Anodic passivation of SiGe

Microelectronics Reliability

Volumn 40, Issue 4-5, 2000, Pages 825-827

  Rappich, J ^a   Fussel W ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; CRYSTAL LATTICES; HEAT TREATMENT; PASSIVATION; PHOTOLUMINESCENCE; SEMICONDUCTOR GROWTH; SINGLE CRYSTALS; THERMOOXIDATION; X RAY PHOTOELECTRON SPECTROSCOPY;

ANODIC PASSIVATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 17144458219     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2714(99)00312-1     Document Type: Article

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