On the anodic passivation of silicon in aqueous KOH solutions

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 191-196

  Lapadatu, Daniel ^a,b   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b SensorNor as   (Norway)

Author keywords

Anodic oxide growth; Anodic passivation

Indexed keywords

CRYSTALLINE MATERIALS; MATHEMATICAL MODELS; PASSIVATION; POTASSIUM COMPOUNDS; SEMICONDUCTOR GROWTH; SILICON WAFERS; SINGLE CRYSTALS; SOLUTIONS; THERMAL EFFECTS;

ANODIC OXIDE GROWTH; ANODIC PASSIVATION; POTASSIUM HYDROXIDE;

SEMICONDUCTING SILICON;

EID: 0031146258     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01441-0     Document Type: Article

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