Comparative study on dry oxidation of heteroepitaxial Si1-xGex and Si1-x-yGexCy on Si(100)+

Journal of Applied Physics

Volumn 80, Issue 3, 1996, Pages 1857-1866

  Xiang, J ^a   Herbots, N ^a   Jacobsson, H ^a   Ye, P ^a   Hearne, S ^a   Whaley, S ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001609583     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362998     Document Type: Article

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