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Volumn 444, Issue 1, 1998, Pages 55-60
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Silicon surface states and subsurface hydrogen
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Author keywords
Capacitance potential curves; Hydrogen; Interface state density; Silicon subsurface region
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Indexed keywords
CAPACITANCE;
DIFFUSION IN SOLIDS;
DISSOLUTION;
ELECTROCHEMISTRY;
ELECTROLYTES;
ETCHING;
FLUORINE COMPOUNDS;
HYDROGEN;
SILICON;
CAPACITANCE VOLTAGE CURVES;
FLUORIDE;
INTERFACE STATE DENSITY;
OPEN CIRCUIT POTENTIALS;
PHASE INTERFACES;
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EID: 0032485163
PISSN: 15726657
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0728(97)00512-3 Document Type: Article |
Times cited : (21)
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References (26)
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