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Volumn 12, Issue 1, 2003, Pages 46-52

Growth precursors and dynamics of dust particle formation in the Ar/CH4 and Ar/C2H2 plasmas

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DUST; EMISSION SPECTROSCOPY; GLOW DISCHARGES; HYDROCARBONS; LASER BEAM EFFECTS; LASER BEAMS; LASER PULSES; MASS SPECTROMETRY; MIXTURES; NUCLEATION;

EID: 0037294930     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/1/306     Document Type: Article
Times cited : (125)

References (28)
  • 2
    • 0012223050 scopus 로고    scopus 로고
    • Semiconductor Industry Association; National Technology Roadmap for Semiconductors (NTRS)
    • Semiconductor Industry Association 1997 National Technology Roadmap for Semiconductors (NTRS)
    • (1997)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.