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Thin Solid Films

Volumn 475, Issue 1-2 SPEC. ISS., 2005, Pages 41-44

Fabrication of Si nano-pillar array through Ni nano-dot mask using inductively coupled plasma

(6) Kim, Mun Ja a Lee, Jin Seung a Kim, Seong Kyu a Yeom, G Y a Yoo, Ji Beom a Park, Chong Yun a

a Sungkyunkwan University (South Korea)

Author keywords

Ni nano dot; Photonic crystal; Si nano pillar

Indexed keywords

CRYSTALS; DEPOSITION; ELECTRIC POTENTIAL; INDUCTIVELY COUPLED PLASMA; MASKS; MORPHOLOGY; NICKEL; PHOTONS; RAPID THERMAL ANNEALING; SILICON;

BIAS VOLTAGE; NI NANO-DOTS; PHOTONIC CRYSTALS; SI NANO-PILLARS;

NANOTECHNOLOGY;

EID: 13444287928 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.07.026 Document Type: Conference Paper

Times cited : (15)

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