Synthesis of diamond films and nanotips through graphite etching

Carbon

Volumn 43, Issue 4, 2005, Pages 748-754

  Yang, Q ^a   Chen, W ^a   Xiao, C ^a   Sammynaiken, R ^a   Hirose, A ^a  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

Author keywords

A. Diamond; B. Chemical vapor deposition, Etching; C. Scanning electronic microscopy, Raman spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; DEPOSITION; ELECTRIC FIELDS; ETCHING; GRAPHITE; HYDROGEN; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SYNTHESIS (CHEMICAL);

GRAPHITE ETCHING; NANOTIPS; NEGATIVE ELECTRON AFFINITY (NEA); ORIENTATION ANGLES;

DIAMOND FILMS;

EID: 13444301357     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2004.10.047     Document Type: Article

References (15)

1. H.O. Pierson Handbook of carbon, diamond and fullerenes 1993 Noyes Park Ridge, NJ p. 244-77
2. S. Matsumoto, Y. Sato, M. Tsutsumi, and N. Setaka Growth of diamond particles from methane-hydrogen gas J Mater Sci 17 1982 3106 3112
3. M. Kamo, Y. Sato, S. Matsumoto, and N. Setaka Diamond synthesis from gas-phase in microwave plasma J Cryst Growth 62 1983 642 644
4. Y. Saito, S. Matsuda, and S. Nogita Synthesis of diamond by decomposition of methane in microwave plasma J Mater Sci Lett 5 1986 565 568
5. S.D. Shin, N.M. Hwang, and D.Y. Kim High rate of diamond deposition through graphite etching in a hot filament CVD reactor Diamond Relat Mater 11 2002 1337 1343
6. C.R. Lin, T.J. Wang, K.C. Chen, and C.H. Chang Nano-tip diamond-like carbon fabrication utilizing plasma sheath potential drop technique Mater Chem Phys 72 2001 126 129
7. Y.T. Jan, H.C. Hsieh, and C.F. Chen Fabrication of nano-size conic diamond arrays by bias assisted PCVD Diamond Relat Mater 8 1999 772 780
8. W.J. Zhang, X.M. Meng, C.Y. Chan, Y. Wu, I. Bello, and S.T. Lee Oriented single-crystal diamond cones and their arrays Appl Phys Lett 82 2003 2622 2624
9. L. Chow, H. Wang, S. Kleckley, A. Schulte, and K. Casey Diamond nucleation on graphite substrate using a pure hydrogen feed Solid State Commun 93 1995 999 1002
10. L.L. Regel, and W.R. Wilcox Selective patterned deposition of diamond using a new technique J Mater Sci Lett 18 1999 427 430
11. L.L. Regel, and W.R. Wilcox Deposition of diamond on graphite and carbon felt from graphite heated in hydrogen at low pressure J Mater Sci Lett 19 2000 455 457
12. Q. Yang, C. Xiao, W. Chen, A.K. Singh, T. Asai, and A. Hirose Growth mechanism and orientation control of well aligned carbon nanotubes Diamond Relat Mater 12 2003 1482 1487
13. Q. Yang, C. Xiao, W. Chen, and A. Hirose Selective growth of diamond and carbon nanostructures by hot filament chemical vapor deposition Diamond Relat Mater 13 2004 433 437
14. L. Zhao, Q. Yang, and S. Li A study on the high growth rate of diamond film by hot-filament CVD J Chin Ceram Soc 24 1996 476 480 [in Chinese]
15. E.G. Gamaly, and T.W. Ebbesen Mechanism of carbon nanotube formation in the arc discharge Phys Rev B 52 1995 2083 2089