A model for the etching of nanoporous silica in C4F8 plasmas based on pore geometry and porosity effects

Journal of the Electrochemical Society

Volumn 152, Issue 2, 2005, Pages

  Cho, Woojin ^a   Rodriguez, Oscar ^a   Saxena, Ravi ^a   Ojha, Manas ^a   Achanta, Ravi ^a   Plawsky, Joel L ^a   Gill, William N ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DECOMPOSITION; FLUOROCARBONS; ION BOMBARDMENT; PLASMA ETCHING; POLYMERIZATION; POLYMERS; PORE SIZE; POROSITY; SILICA;

ETCH RATE; FLUOROCARBON FILMS; METHYLSILSESQUIXANE (MSQ); NONPOROUS MATERIALS (NPM);

POROUS SILICON;

EID: 14744281074     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1850375     Document Type: Article

References (16)

1. S. V. Nitta, V. Pisupatti, A. Jain, J. Wayner, W. N. Gill, and J. L. Plawsky, J. Vac. Sci. Technol. B, 17, 205 (1999).
2. A. Jain, S. Rogojevic, S. Ponoth, W. N. Gill, J. L. Plawsky, E. Simonyi, S. T. Chen, and P. S. Ho, J. Appl. Phys., 91, 3275 (2002).
3. G. S. Oehrlein and H. L. Williams, J. Appl. Phys., 62, 662 (1987).
4. G. S. Oehrlein, Y. Zhang, D. Vender, and M. Haverlag, J. Vac. Sci. Technol. A, 12, 323 (1994).
5. T. E. F. M. Standaert, M. Schaepkens, N. R. Rueger, P. G. M. Sebel, G. S. Oehrlein, and J. M. Cook, J. Vac. Sci. Technol. A, 16, 239 (1998).
6. G. S. Oehrlein, Y. Zhang, D. Vender, and O. Joubert, J. Vac. Sci. Technol. A, 12, 333 (1994).
7. N. R. Rueger, J. J. Beulens, M. Schaepkens, M. F. Doemling, I. M. Mirza, T. E. F. M. Standaert, and G. S. Oehrlein, J. Vac. Sci. Technol. A, 15, 1881 (1997).
8. D. Zhang and M. J. Kusher, J. Vac. Sci. Technol. A, 19, 524 (2001).
9. J. P. Booth, G. Cunge, P. Chabert, and N. Sadeghi, Appl. Phys., 85, 3097 (1999).
10. T. E. F. M. Standaert P. J. Matsuo, S. D. Allen, G. S. Oehrlein, and T. J. Dalton, J. Vac. Sci Technol. A, 17, 741 (1999).
11. T. E. F. M. Standaert, E. A. Joseph, G. S. Oehrlein, A. lain, W. N. Gill, P. C. Wayner, Jr., and J. L. Plawsky, J. Vac. Sci. Technol. A, 18, 2742 (2000).
12. R. Saxena, O. Rodriguez, W. Cho, W. N. Gill, J. L. Plawsky, M. R. Baklanov, and K. P. Mogilnikov, J. Non-Cryst. Solids, 349, 189 (2004).
13. S. I. Gregg and K. S. W. Sing, Adsorption, Surface Area and Porosity, Academic Press, New York (1967).
14. J. W. McBain, J. Am. Chem. Soc., 57, 699 (1935).
15. M. R. Baklanov, K. P. Moginikov, V. G. Polovinkin, and F. N. Dultsev, J. Vac. Sci. Technol. B, 18, 1385 (2000).
16. M. R. Baklanov and K. P. Mogilnikov, Microelectron. Eng., 64, 335 (2002).