Optimization of plasma parameters for the production of silicon nano-crystals

New Journal of Physics

Volumn 5, Issue , 2003, Pages

  Chaâbane, Nihed ^a   Kharchenko, Andriy V ^a   Vach, Holger ^a   Roca I Cabarrocas, Pere ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2942616355     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/5/1/337     Document Type: Article

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