Carbon nanotube growth by PECVD: A review

Plasma Sources Science and Technology

Volumn 12, Issue 2, 2003, Pages 205-216

  Meyyappan, M ^a   Delzeit, Lance ^a   Cassell, Alan ^a   Hash, David ^a  

^a NASA AMES RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; CRYSTAL GROWTH; MATHEMATICAL MODELS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA SOURCES;

CATALYST PREPARATION; NANOTUBE GROWTH;

CARBON NANOTUBES;

EID: 0037607842     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/2/312     Document Type: Article

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