Carbon-based molecular sieve membranes for gas separation by inductively-coupled-plasma chemical vapor deposition

Microporous and Mesoporous Materials

Volumn 77, Issue 2-3, 2005, Pages 167-174

  Wang, Liang Jun ^a   Hong, Franklin Chau Nan ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

CMS membranes; Diamond like carbon; Gas separation; Ion bombardment; Plasma CVD

Indexed keywords

CHEMICAL VAPOR DEPOSITION; INDUCTIVELY COUPLED PLASMA; IONS; MEMBRANES; POROUS MATERIALS; PYROLYSIS; SURFACE TREATMENT;

CARBON-BASED MOLECULAR SIEVE (CMS) FILMS; GAS SEPARATION; HIGH ENERGY IONS; PERMEANCE;

MOLECULAR SIEVES;

GAS-GAS SEPARATION; MOLECULAR SIEVE; PLASMA; VAPOR DEPOSITION;

EID: 11244304779     PISSN: 13871811     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micromeso.2004.09.001     Document Type: Article

References (34)

1. Y.D. Chen, R.T. Yang, Preparation of carbon molecular sieve membrane and diffusion of binary mixtures in the membrane, Ind. Eng. Chem. Res. 33 (1994) 3146.
2. H.C. Foley, Carbogenic molecular sieves: synthesis, properties and applications, Micropor. Mater. 4 (1995) 407.
3. A.B. Fuertes, T.A. Centeno, Preparation of supported asymmetric carbon molecular sieve membranes, J. Membr, Sci. 144 (1998) 105.
4. L.M. Robeson, Correlation of separation factor versus permeability for polymeric membranes, J. Membr. Sci. 62 (1991) 165.
5. S.A. Sterm, Polymers for gas separations: The next decade, J. Membr. Sci. 94 (1994) 1.
6. J.E. Koresh, A. Soffer, Molecular sieve carbon permselective membrane. Part I. Presentation of a new device for gas mixture separation, Sep. Sci. Technol. 18 (1983) 723.
7. 2 mixture, Sep. Sci. Technol. 23 (1987) 973.
8. C.W. Jones, W.J. Koros, Carbon molecular sieve gas separation membranes-I. Preparation and characterization based on polyimide precursors, Carbon 32 (1994) 1419.
9. K.M. Steel, W.J. Koros, Investigation of porosity of carbon materials and related effects on gas separation properties, Carbon 41 (2003) 253.
10. D.Q. Vu, W.J. Koros, S.J. Miller, Mixed matrix membranes using carbon molecular sieves I. Preparation and experimental results, J. Membr. Sci. 211 (2003) 311.
11. M.B. Rao, S. Sircar, C. Golden, Adsorbent membranes for gas separation, US Patent 5,104,425, 1992.
12. V.M. Linkov, R.D. Sanderson, E.P, Jacobs, Highly asymmetrical carbon membranes, J. Membr. Sci. 95 (1994) 93.
13. A.B. Fuertes, T.A. Centeno, Carbon molecular sieve membranes from polyetherimide, Micropor. Mesopor. Mater. 26 (1998) 23.
14. A.B. Fuertes, D.M. Nevskaia, T.A. Centeno, Carbon composite membranes from Matrimid and Kapton polyimide, Micropor. Mesopor. Mater. 33 (1999) 115.
15. T.A. Centeno, A.B. Fuertes, Carbon molecular sieve membranes derived from a phenolic resin supported on porous ceramic tubes, Separat. Purifie. Technol. 33 (2001) 25.
16. T.A. Centeno, J.L. Vilas, A.B. Fuertes, Effects of phenolic resin pyrolysis conditions on carbon membrane performance for gas separation, J. Membr. Sci. 228 (2004) 45.
17. Y. Yin, R.E. Collins, Carbon molecular films produced by dc sputtering, Carbon 31 (1993) 1333.
18. C.Y. Hsu, L.Y. Chen, F.C.-N. Hong, Properties of diamond-like carbon films deposited by ion plating with a pulsed substrate bias, Diamond Relat. Mater. 7 (1998) 884.
19. H. Matsuyama, T. Shiraishi, M. Teramoto, Plasma polymerized membranes from organosilicon compounds for separation of oxygen over nitrogen, J. Appl. Polym. Sci. 54 (1994) 1665.
20. M. Yamamoto, J. Sakata, M. Hirai, Plasma polymerized membranes and gas permeability I, J. Appl. Polym. Sci. 29 (1984) 2981.
21. J. Sakata, M. Yamamoto, M. Hirai, Plasma polymerized membranes and gas permeability II, J. Appl. Polym. Sci. 31 (1986) 1999.
22. K. Kusakabe, Z.Y. Li, H. Maeda, S. Morooka, Preparation of supported composite membrane by pyrolysis of polycarbosilane for gas separation at high temperature, J. Membr. Sci. 103 (1995) 175.
23. 2 films, Chem. Eng. Sci. 44 (1989) 1829.
24. 2-Vycor films, J. Membr. Sci. 87 (1994) 281.
25. 2 membrane formed in pores of alumina support tube by chemical vapor deposition with tetraethyl orthosilicate, Ind. Eng. Chem. Res. 33 (1994) 2096.
26. 2 membrane in macropores of αalumina support tube by thermal decomposition of TEOS, J. Membr. Sci. 101 (1995) 89.
27. Z. Li, K. Kusakabe, S. Morooka, Preparation of thermostable amorphous Si-C-O membrane and its application to gas separation at elevated temperature, J. Membr. Sci. 87 (1996) 159.
28. A.B. Shelekhin, E.J. Grosgogeat, S.-T. Hwang, Gas separation properties of a new polymer/inorganic composite membrane, J. Membr. Sci. 66 (1992) 129.
29. D. Li, S.-T. Hwang, Preparation and characterization of silicon based inorganic membrane for gas separation, J. Membr. Sci. 59 (1991) 331.
30. D. Li, S.-T. Hwang, Gas separation by silicon based inorganic membrane at high temperature, J. Membr. Sci. 66 (1992) 119.
31. Z. Li, K. Kusakabe, S. Morooka, Pore structure and permeance of amorphous Si-C-O membranes with high durability at elevated temperature, Sep. Sci. Technol. 32 (1997) 1233.
32. F. Huber, J. Springer, M. Muhler, Plasma polyer membranes from hexafluoroethane/hydrogen mixtures for separation of oxygen and nitrogen, J. Appl. Polym. Sci. 63 (1997) 1517.
33. J. Hayashi, H. Mizuta, M. Yamamoto, K. Kusakabe, S. Morooka, Pore size control of carbonized BPDA-pp'ODA polyimide membrane by chemical vapor deposition of carbon, J. Membr. Sci. 124 (1997) 243.
34. W.J. Koros, Membranes: Learning a lesson from nature, Chem. Eng. Prog. 91 (1995) 68.