Modelling of silicon hydride clustering in a low-pressure silane plasma

Journal of Physics D: Applied Physics

Volumn 33, Issue 21, 2000, Pages 2731-2746

  Bhandarkar, U V ^a   Swihart, M T ^b   Girshick, S L ^a   Kortshagen, U R ^a  

^a University of Minnesota   (United States)

^b State University of New York ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DISSOCIATION; ELECTRIC DISCHARGES; MATHEMATICAL MODELS; NEGATIVE IONS; NUCLEATION; PLASMAS;

LOW-PRESSURE SILANE PLASMAS;

SILANES;

EID: 0034324652     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/21/311     Document Type: Article

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