Shedding light on the growth of amorphous, polymorphous, protocrystalline and microcrystalline silicon thin films

Thin Solid Films

Volumn 383, Issue 1-2, 2001, Pages 161-164

  Fontcuberta I Morral, A ^a   Roca I Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CRYSTALLIZATION; MONOLAYERS; POLYSILICON; SUBSTRATES; THERMAL GRADIENTS;

POLYMORPHOUS SILICON THIN FILMS;

THIN FILMS;

EID: 0035247871     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01596-0     Document Type: Article

References (13)

1. Koh J, Ferlauto A.S., Rovira P.I., Wronski C.R., Collins R.W. Appl. Phys. Lett. 75:1999;2286.
2. Guha S., Yang J., Williamson D.L., Lubianiker Y., Cohen J.D., Mahan A.H. Appl. Phys. Lett. 74:1999;1860.
3. Roca i Cabarrocas P., Hamma S., Sharma S.N., Costa J., Bertran E. J. Non-Cryst. Solids. 227-230:1998;871.
4. Meaudre M., Meaudre R., Butté R., Vignoli S., Longeaud C., Kleider J.P., Roca i Cabarrocas P. J. Appl. Phys. 86:1999;946.
5. Longeaud C., Kleider J.P., Roca i Cabarrocas P., Hamma S., Meaudre R., Meaudre M. J. Non-Cryst. Solids. 227-230:1999;96.
6. Bruggeman D.A.G. Ann. Phys. (Leipzig). 24:1935;636.
7. Aspnes D.E. Thin Solid Films. 89:1982;249.
8. Jellison G.E. Jr, Chisholm M.F., Gorbatkin S.M. Appl. Phys. Lett. 62:1993;3348.
9. Jellison G.E. Jr, Modine F.A. Appl.Phys.Lett. 69:1996.
10. Hove L.Van. Phys. Rev. B. 89:1959;1189.
11. A. Fontcuberta i Morral, R. Brenot, E.A.G. Hamers, R. Vanderhagen, P. Roca i Cabarrocas, J. Non-Cryst. Solids, in press.
12. Hamma S., Colliquet D., Roca i Cabarrocas P. Mater. Res. Soc. Symp. Proc. 507:1998;505.
13. Perrin J., Molinas-Mata P., Belenguer P. J. Phys. D: Appl. Phys. 27:1994;2499.