Nanocantilevers made of bent silicon carbide nanowire-in-silicon oxide nanocones

Applied Physics Letters

Volumn 85, Issue 22, 2004, Pages 5388-5390

  Lin, Ming ^a   Loh, Kian Ping ^a   Boothroyd, Chris ^b   Du, Anyan ^c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CONICAL STRUCTURES; NANOCANTILEVERS; NANOCONES; PLASMA-ASSISTED SYNTHESIS;

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY;

NANOSTRUCTURED MATERIALS;

EID: 11044231008     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1828601     Document Type: Article

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