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Surface Science Reports

Volumn 42, Issue 6-8, 2001, Pages 207-328

The interaction of silanes with silicon single crystal surfaces: Microscopic processes and structures

(1) Rauscher, Hubert a

a UNIVERSITY OF ULM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ATOMIC PHYSICS; CRYSTAL GROWTH; CRYSTAL MICROSTRUCTURE; DISSOCIATION; REACTION KINETICS; SILANES; SILICON; SINGLE CRYSTALS;

HOMOEPITAXIAL LAYER;

SURFACE CHEMISTRY;

EID: 0035336882 PISSN: 01675729 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-5729(01)00011-5 Document Type: Review

Times cited : (65)

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