STM study of low pressure adsorption of silane on Si(111)7 × 7

Surface Science

Volumn 350, Issue 1-3, 1996, Pages

  Albertini, D ^a   Thibaudau, F ^a   Masson, L ^a   Salvan, F ^a  

^a AIX MARSEILLE UNIVERSITY   (France)

Author keywords

Chemical vapor deposition; Chemisorption; Low index single crystal surfaces; Scanning tunneling microscopy; Silane; Silicon

Indexed keywords

ATOMS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; CHEMISORPTION; MOLECULAR STRUCTURE; SCANNING TUNNELING MICROSCOPY; SILANES; SILICON; SINGLE CRYSTALS; SURFACE PHENOMENA; SURFACES;

ADATOM; BACKBONDS; LOW INDEX SINGLE CRYSTAL SURFACES;

ADSORPTION;

EID: 0030126793     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(96)01340-4     Document Type: Article

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