New hydrogen desorption kinetics from vicinal Si(0 0 1) surfaces observed by reflectance anisotropy spectroscopy

Journal of Crystal Growth

Volumn 175-176, Issue PART 1, 1997, Pages 477-480

  Zhang, J ^a   Lees, A K ^a   Taylor, A G ^a   Xie, M H ^a   Joyce, B A ^a   Sobiesierksi, Z ^b   Westwood, D I ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b CARDIFF UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION; HYDROGEN; SPECTROSCOPIC ANALYSIS; SURFACE STRUCTURE;

HYDROGEN DESORPTION KINETICS; REFLECTANCE ANISOTROPY SPECTROSCOPY;

SILICON WAFERS;

EID: 0031147612     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)00858-5     Document Type: Article

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