Gas phase and surface reactions in subatmospheric chemical vapor deposition of tetraethylorthosilicate-ozone

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 948-954

  Gill, William N ^a   Ganguli, Seshadri ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001543790     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589513     Document Type: Article

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