Atmospheric pressure non-equilibrium plasma jet technology: general features, specificities and applications in surface processing of materials

Surface and Coatings Technology

Volumn 322, Issue , 2017, Pages 174-201

  Fanelli, Fiorenza ^a   Fracassi, Francesco ^a  

^a UNIVERSITY OF BARI   (Italy)

Author keywords

Atmospheric pressure non equilibrium plasma; Plasma etching; Plasma jet; Plasma treatment; Plasma assisted deposition; Surface processing

Indexed keywords

ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; COST REDUCTION; DEPOSITION; OPTIMIZATION; PLASMA ETCHING; PLASMA JETS; PROCESS CONTROL; THERMAL PLUMES;

LITERATURE REVIEWS; NONEQUILIBRIUM PLASMAS; PLASMA ASSISTED DEPOSITION; PLASMA JET TECHNOLOGY; PLASMA TREATMENT; SURFACE PROCESSING; THIN-FILM DEPOSITIONS; THREE-DIMENSIONAL OBJECT;

PLASMA APPLICATIONS;

EID: 85019550000     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2017.05.027     Document Type: Article

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