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Journal of Thermal Spray Technology
Volumn 20, Issue 4, 2011, Pages 744-759
Nonequilibrium atmospheric plasma deposition
Author keywords

afterglow; APGD; atmospheric pressure; DBD; microwave; PACVD; PECVD; post discharge; remote plasma; resonant cavity
Indexed keywords

AFTERGLOW; APGD; DBD; PACVD; POST-DISCHARGE; REMOTE PLASMAS; RESONANT CAVITY;
EID: 79959548706     PISSN: 10599630     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11666-011-9642-0     Document Type: Review
Times cited : (50)
References (110)
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