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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 6, 2013, Pages

Spray deposition of nanostructured metal films using hydrodynamically stabilized, high pressure microplasmas

(2) Koh, Travis L a Gordon, Michael J a

a University of California (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LOW SUBSTRATE TEMPERATURE; MICRO-PLASMA JET; NANO-STRUCTURED METAL FILMS; NANOSTRUCTURED FILMS; NI NANOPARTICLES; ORGANOMETALLIC PRECURSORS; REDUCING CONDITIONS; SPRAY DEPOSITION;

COPPER; FLUID DYNAMICS; METALLIC FILMS; METALS; METAMATERIALS; NANOPARTICLES; NANOSTRUCTURED MATERIALS; ORGANOMETALLICS;

PLASMA DEVICES;

EID: 84887912477 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.4825129 Document Type: Article

Times cited : (9)

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