Local deposition of SiOx plasma polymer films by a miniaturized atmospheric pressure plasma jet (APPJ)

Journal of Physics D: Applied Physics

Volumn 41, Issue 19, 2008, Pages

  Schafer J ^a   Foest, R ^a   Quade, A ^a   Ohl, A ^a   Weltmann, K D ^a  

^a INP Greifswald   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABS RESINS; JETS; POLYMERIC GLASS; SILICON; SILICON COMPOUNDS; SURFACE TREATMENT;

ATMOSPHERIC PLASMAS; DEPOSITION EXPERIMENTS; GLASS SAMPLES; INNER WALLS; LOCAL DEPOSITION; ORGANIC FILMS;

PLASMA DEPOSITION;

EID: 53349177233     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/19/194010     Document Type: Article

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