SCOPUS 정보 검색 플랫폼

Plasma Chemistry and Plasma Processing

Volumn 31, Issue 1, 2011, Pages 91-107

New process simulation procedure for high-rate plasma jet machining

(2) Meister, Johannes a Arnold, Thomas a

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

Numerical simulation; Optical manufacturing; Plasma etching; Plasma jet machining; Temperature dependency

Indexed keywords

CONVENTIONAL TECHNOLOGY; DWELL TIME; FREE-FORM SURFACE; HIGH RATE; JET MACHINING; MACHINING ERROR; MATERIAL REMOVAL; MATERIAL REMOVAL RATE; NEW PROCESS; NONLINEAR EFFECT; NUMERICAL SIMULATION; OPTICAL COMPONENTS; OPTICAL MANUFACTURING; PLASMA JET MACHINING; PROCESS SIMULATION MODEL; REACTIVE PLASMAS; SPATIO-TEMPORAL VARIATION; SURFACE ATOMS; SURFACE FIGURING; SURFACE TEMPERATURES; TEMPERATURE DEPENDENCY; TEMPERATURE-DEPENDENT MATERIAL; ULTRAPRECISION MACHINING; WORK PIECES;

ATMOSPHERIC TEMPERATURE; HEAT FLUX; INDUSTRIAL APPLICATIONS; MACHINING; MANUFACTURE; PLASMA ACCELERATORS; PLASMA ETCHING; PLASMA JETS; PLASMAS; PRECISION ENGINEERING; STRIPPING (REMOVAL); SURFACE PROPERTIES; SURFACE TOPOGRAPHY;

COMPUTER SIMULATION;

EID: 79551568049 PISSN: 02724324 EISSN: None Source Type: Journal
DOI: 10.1007/s11090-010-9267-y Document Type: Article

Times cited : (53)

References (35)

1
- 0042854724
- Surface treatment of metals using an atmospheric pressure plasma jet and their surface characteristics
- DOI 10.1016/S0257-8972(03)00560-7
- MC Kim SH Yang J-H Boo JG Han 2003 Surf Coat Tech 174-175 839 844 10.1016/S0257-8972(03)00560-7 (Pubitemid 37054328)
- (2003) Surface and Coatings Technology , vol.174-175 , pp. 839-844
- Kim, M.C.¹ Yang, S.H.² Boo, J.-H.³ Han, J.G.⁴

2
- 0038721080
- Multi-jet atmospheric glow plasma cleaning of ablation debris from micro-via drilling process
- DOI 10.1016/S0257-8972(03)00291-3
- ES Lee HI Park HK Baik S-J Lee KM Song MK Hwang CS Huh 2003 Surf Coat Tech 171 307 311 10.1016/S0257-8972(03)00291-3 (Pubitemid 36689529)
- (2003) Surface and Coatings Technology , vol.171 , Issue.1-3 , pp. 307-311
- Lee, E.S.¹ Park, H.I.² Baik, H.K.³ Lee, S.-J.⁴ Song, K.M.⁵ Hwang, M.K.⁶ Huh, C.S.⁷

3
- 76049085786
- 10.1099/jmm.0.013714-0
- S Rupf A Lehmann M Hannig B Schäfer A Schubert U Feldmann A Schindler 2010 J Med Microbiol 59 206 212 10.1099/jmm.0.013714-0
- (2010) J Med Microbiol , vol.59 , pp. 206-212
- Rupf, S.¹ Lehmann, A.² Hannig, M.³ Schäfer, B.⁴ Schubert, A.⁵ Feldmann, U.⁶ Schindler, A.⁷

4
- 0032140139
- 10.1088/0963-0252/7/3/006 1998PSST.7.286B
- SE Babayan JY Jeong VJ Tu J Park GS Selwyn RF Hicks 1998 Plasma Sources Sci Technol 7 286 288 10.1088/0963-0252/7/3/006 1998PSST....7..286B
- (1998) Plasma Sources Sci Technol , vol.7 , pp. 286-288
- Babayan, S.E.¹ Jeong, J.Y.² Tu, V.J.³ Park, J.⁴ Selwyn, G.S.⁵ Hicks, R.F.⁶

5
- 33750705922
- A new reactive atom plasma technology (RAPT) for precision machining: The etching of ULE® surfaces
- DOI 10.1002/adem.200600028
- C Fanara JR Shore Nicholls N Lyford J Kelley J Carr P Sommer 2006 Adv Eng Mater 8 933 939 10.1002/adem.200600028 (Pubitemid 44703688)
- (2006) Advanced Engineering Materials , vol.8 , Issue.10 , pp. 933-939
- Fanara, C.¹ Shore, P.² Nicholls, J.R.³ Lyford, N.⁴ Kelley, J.⁵ Carr, J.⁶ Sommer, P.⁷

6
- 0035443232
- Ultrahigh-rate plasma jet chemical etching of silicon
- DOI 10.1116/1.1395621
- T Arnold G Böhm A Schindler 2001 J Vac Sci Technol A 19 2586 10.1116/1.1395621 2001JVST...19.2586A (Pubitemid 32934674)
- (2001) Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films , vol.19 , Issue.5 , pp. 2586-2589
- Arnold, Th.¹ Boehm, G.² Schindler, A.³

7
- 77950857031
- 10.1016/j.nima.2009.11.013 2010NIMPA.616.147A
- T Arnold G Böhm R Fechner J Meister A Nickel F Frost T Hänsel A Schindler 2010 Nucl Instrum Meth A 616 147 156 10.1016/j.nima.2009.11.013 2010NIMPA.616..147A
- (2010) Nucl Instrum Meth A , vol.616 , pp. 147-156
- Arnold, T.¹ Böhm, G.² Fechner, R.³ Meister, J.⁴ Nickel, A.⁵ Frost, F.⁶ Hänsel, T.⁷ Schindler, A.⁸

8
- 0002197466
- eds. Furukawa Y, Mori Y & Kataoka T, The Japan Society for Precision Engineering, Tokyo
- Böhm G, Frank W, Schindler A, Nickel A, Thomas H-J, Bigl F, Weiser M (1999) Precision Science and Technology for Perfect Surfaces, eds. Furukawa Y, Mori Y & Kataoka T, The Japan Society for Precision Engineering, Tokyo 231-236
- (1999) Precision Science and Technology for Perfect Surfaces , pp. 231-236
- Böhm G, F.¹

9
- 0018441483
- PLASMA ETCHING - A DISCUSSION OF MECHANISMS
- DOI 10.1116/1.569958
- JW Coburn HF Winters 1979 J Vac Sci Technol 16 391 403 10.1116/1.569958 1979JVST...16..391C (Pubitemid 9458832)
- (1979) J Vac Sci Technol , vol.16 , Issue.2 , pp. 391-403
- Coburn, J.W.¹ Winters Harold, F.²

10
- 0020102844
- 10.1007/BF00566856 1982AIPC.87.1C
- JW Coburn 1982 Plasma Chem Plasma P 2 1 10.1007/BF00566856 1982AIPC...87....1C
- (1982) Plasma Chem Plasma P , vol.2 , pp. 1
- Coburn, J.W.¹

11
- 0020736395
- SURFACE PROCESSES IN PLASMA-ASSISTED ETCHING ENVIRONMENTS
- DOI 10.1116/1.582629
- HF Winters JW Coburn TJ Chuang 1983 J Vac Sci Technol B 1 469 10.1116/1.582629 (Pubitemid 13570557)
- (1983) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.1 , Issue.2 , pp. 469-480
- Winters Harold, F.¹ Coburn, J.W.² Chuang, T.J.³

12
- 0035440110
- 3 etching of silicon dioxide, with comparisons to etch rate and diagnostic data
- DOI 10.1116/1.1387048
- P Ho JE Johannes RJ Buss 2001 J Vac Sci Technol A 19 2344 2367 10.1116/1.1387048 2001JVST...19.2344H (Pubitemid 32934643)
- (2001) Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films , vol.19 , Issue.5 , pp. 2344-2367
- Ho, P.¹ Johannes, J.E.² Buss, R.J.³ Meeks, E.⁴

13
- 0021494806
- 4 PLASMA ETCHING SILICON
- DOI 10.1063/1.334108
- D Edelson DL Flamm 1984 J Appl Phys 56 1522 1531 10.1063/1.334108 1984JAP....56.1522E (Pubitemid 14651740)
- (1984) Journal of Applied Physics , vol.56 , Issue.5 , pp. 1522-1531
- Edelson David¹ Flamm Daniel, L.²

14
- 84984351578
- 10.1002/ctpp.2150310303 1991CoPP.31.279H
- M Haverlag H Kersten GMW Kroesen FJ de Hoog A Rutscher 1991 Contrib Plasma Phys 31 279 282 10.1002/ctpp.2150310303 1991CoPP...31..279H
- (1991) Contrib Plasma Phys , vol.31 , pp. 279-282
- Haverlag, M.¹ Kersten, H.² Kroesen, G.M.W.³ De Hoog, F.J.⁴ Rutscher, A.⁵

15
- 84985810430
- 10.1002/ctpp.2150290304 1989CoPP.29.263D
- H Deutsch H Kersten A Rutscher 1989 Contrib Plasma Phys 29 263 284 10.1002/ctpp.2150290304 1989CoPP...29..263D
- (1989) Contrib Plasma Phys , vol.29 , pp. 263-284
- Deutsch, H.¹ Kersten, H.² Rutscher, A.³

16
- 0018531085
- 2
- DOI 10.1063/1.325755
- DL Flamm CJ Mogab ER Sklaver 1979 J Appl Phys 50 6211 6213 10.1063/1.325755 1979JAP....50.6211F (Pubitemid 10476072)
- (1979) Journal of Applied Physics , vol.50 , Issue.10 , pp. 6211-6213
- Flamm, D.L.¹ Mogab, C.J.² Sklaver, E.R.³

17
- 0001526581
- 10.1063/1.1311808 2000JAP.88.5570G
- E Gogolides P Vauvert G Kokkoris G Turban AG Boudouvis 2000 J Appl Phys 88 5570 5584 10.1063/1.1311808 2000JAP....88.5570G
- (2000) J Appl Phys , vol.88 , pp. 5570-5584
- Gogolides, E.¹ Vauvert, P.² Kokkoris, G.³ Turban, G.⁴ Boudouvis, A.G.⁵

18
- 0343407985
- 10.1143/JJAP.29.2236 1990JaJAP.29.2236I
- N Ikegami N Ozawa Y Miyakawa M Konishi J Kanamori 1990 Jpn J Appl Phys 29 2236 2242 10.1143/JJAP.29.2236 1990JaJAP..29.2236I
- (1990) Jpn J Appl Phys , vol.29 , pp. 2236-2242
- Ikegami, N.¹ Ozawa, N.² Miyakawa, Y.³ Konishi, M.⁴ Kanamori, J.⁵

19
- 0029221232
- 10.1016/0141-6359(94)00002-H
- TW Drueding TG Bifano SC Fawcett 1995 Precis Eng 17 10 21 10.1016/0141-6359(94)00002-H
- (1995) Precis Eng , vol.17 , pp. 10-21
- Drueding, T.W.¹ Bifano, T.G.² Fawcett, S.C.³

20
- 35348995090
- Ultragenaue Oberflachen-endbearbeitung Mittels Ionenstrahltechniken
- DOI 10.1002/vipr.200700330
- T Hänsel F Frost A Nickel A Schindler 2007 Vakuum Forschung Praxis 19 24 10.1002/vipr.200700330 (Pubitemid 47598696)
- (2007) Vakuum in Forschung und Praxis , vol.19 , Issue.5 , pp. 24-30
- Hansel, T.¹ Frost, F.² Nickel, A.³ Schindler, A.⁴

21
- 0008768005
- Gold R (1964) Mathematics and computer research and development rep. ANL-6984
- (1964) Mathematics and Computer Research and Development Rep. ANL-6984
- Gold, R.¹

22
- 0002594849
- 10.1364/JOSA.62.000055 1972OSAJ.62.55R
- WH Richardson 1972 J Opt Soc Am A 62 55 59 10.1364/JOSA.62.000055 1972OSAJ...62...55R
- (1972) J Opt Soc Am A , vol.62 , pp. 55-59
- Richardson, W.H.¹

23
- 84938089681
- OSA Technical Digest (CD): paper JWD6
- Hänsel T, Nickel A, Schindler A (2008) Optical fabrication and testing, OSA Technical Digest (CD): paper JWD6
- (2008) Optical Fabrication and Testing
- Hänsel T, N.¹

24
- 84864165280
- Heraeus Quarzglas GmbH & Co. KG
- Heraeus Quarzglas GmbH & Co. KG www.heraeus-quarzglas.com

25
- 0345597873
- Phlogiston Press, Cambridge, 3rd edition
- A heat transfer textbook Lienhard IV JH, Lienhard V JH (2008) Phlogiston Press, Cambridge, 3rd edition
- (2008) A Heat Transfer Textbook
- Lienhard, I.V.J.H.¹ Lienhard, V.J.H.²

26
- 77954911802
- 10.1002/ppap.200930509
- J Meister G Böhm I-M Eichentopf T Arnold 2009 Plasma Process Polym 6 S209 S213 10.1002/ppap.200930509
- (2009) Plasma Process Polym , vol.6
- Meister, J.¹ Böhm, G.² Eichentopf, I.-M.³ Arnold, T.⁴

27
- 33947662974
- Theoretical study in two dimensions of the energy transfer between an electric arc and an anode material
- DOI 10.1088/0022-3727/40/2/020, PII S0022372707327447, 020
- M Masquère P Freton JJ Gonzalez 2007 J Phys D Appl Phys 40 432 446 10.1088/0022-3727/40/2/020 2007JPhD...40..432M (Pubitemid 46485820)
- (2007) Journal of Physics D: Applied Physics , vol.40 , Issue.2 , pp. 432-446
- Masquere, M.¹ Freton, P.² Gonzalez, J.J.³

28
- 33746809019
- Numerical analysis of grinding temperature measurement by the foil/workpiece thermocouple method
- DOI 10.1016/j.ijmachtools.2005.12.009, PII S0890695505003263
- A Lefebvre P Vieville P Lipinski C Lescalier 2006 Int J Mach Tools Manuf 46 1716 1726 10.1016/j.ijmachtools.2005.12.009 (Pubitemid 44175818)
- (2006) International Journal of Machine Tools and Manufacture , vol.46 , Issue.14 , pp. 1716-1726
- Lefebvre, A.¹ Vieville, P.² Lipinski, P.³ Lescalier, C.⁴

29
- 79551562053
- Hannover
- Bianco N, Manca O, Nardini S, Tamburrino S (2008) Proc COMSOL Conf 2008 Hannover
- (2008) Proc COMSOL Conf 2008
- Bianco, N.¹ Manca, O.² Nardini, S.³ Tamburrino, S.⁴

30
- 84975517323
- ® http://www.comsol.com
- ®
- Comsol, A.B.¹

31
- 41949087330
- Heat-transfer distribution for an impinging laminar flame jet to a flat plate
- DOI 10.1016/j.ijheatmasstransfer.2007.08.036, PII S001793100700628X
- MJ Remie G Särner MFG Cremers A Omrane KRAM Schreel M Aldén MPH de Goey 2008 Int J Heat Mass Tran 51 3144 3152 10.1016/j.ijheatmasstransfer. 2007.08.036 1143.80342 (Pubitemid 351514749)
- (2008) International Journal of Heat and Mass Transfer , vol.51 , Issue.11-12 , pp. 3144-3152
- Remie, M.J.¹ Sarner, G.² Cremers, M.F.G.³ Omrane, A.⁴ Schreel, K.R.A.M.⁵ Alden, L.E.M.⁶ De Goey, L.P.H.⁷

32
- 0034107175
- The effect of inclination on the heat transfer between a flat surface and an impinging two-dimensional air jet
- DOI 10.1016/S0142-727X(99)00080-6, PII S0142727X99000806
- H Beitelmal MA Saad CD Patel 2000 Int Heat Fluid Flow 51 156 163 10.1016/S0142-727X(99)00080-6 (Pubitemid 30255033)
- (2000) International Journal of Heat and Fluid Flow , vol.21 , Issue.2 , pp. 156-163
- Beitelmal, A.H.¹ Saad, M.A.² Patel, C.D.³

33
- 0035797580
- The energy balance at substrate surfaces during plasma processing
- DOI 10.1016/S0042-207X(01)00350-5, PII S0042207X01003505
- H Kersten H Deutsch H Steffen GMW Kroesen R Hippler 2001 Vacuum 63 385 431 10.1016/S0042-207X(01)00350-5 (Pubitemid 32704939)
- (2001) Vacuum , vol.63 , Issue.3 , pp. 385-431
- Kersten, H.¹ Deutsch, H.² Steffen, H.³ Kroesen, G.M.W.⁴ Hippler, R.⁵

34
- 0034967364
- 10.1007/s003390100811 2001ApPhA.72.531K
- H Kersten D Rohde H Steffen H Deutsch R Hippler GHPM Swinkels GMW Kroesen 2001 Appl Phys A 72 531 540 10.1007/s003390100811 2001ApPhA..72..531K
- (2001) Appl Phys A , vol.72 , pp. 531-540
- Kersten, H.¹ Rohde, D.² Steffen, H.³ Deutsch, H.⁴ Hippler, R.⁵ Ghpm, S.⁶ Kroesen, G.M.W.⁷

35
- 53349151566
- Dussart R, Thomann AL, Pichon LE, Bedra L, Semmar N, Lefaucheux P, Mathias J, Tessier Y (2008) Appl Phys Lett 93:131502-131503
- (2008) Appl Phys Lett , vol.93 , pp. 131502-131503
- Dussart, R.¹ Thomann, A.L.² Pichon, L.E.³ Bedra, L.⁴ Semmar, N.⁵ Lefaucheux, P.⁶ Mathias, J.⁷ Tessier, Y.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.