|
|
Volumn 517, Issue 14, 2009, Pages 4229-4232
|
|
Diamond-like carbon thin films synthesis by low temperature atmospheric pressure plasma method
a
|
|
Author keywords
Atmospheric pressure plasma; Cold plasma; Diamond like carbon; Dielectric barrier discharge; Field emission; Plasma jet
|
|
Indexed keywords
ATMOSPHERIC PRESSURE PLASMA;
COLD PLASMA;
DEPOSITION PARAMETERS;
DIAMOND-LIKE CARBON;
DIAMOND-LIKE CARBON THIN FILMS;
DIELECTRIC BARRIER DISCHARGE;
DLC THIN FILMS;
ETCHING PROCESS;
ETCHING REACTIONS;
FIELD-EMISSION CHARACTERISTICS;
HYDROGEN GAS;
INDIUM-TIN OXIDES;
LOW TEMPERATURES;
PLASMA SYSTEMS;
QUARTZ TUBES;
TURN-ON ELECTRIC FIELDS;
WORKING GAS;
ACETYLENE;
ATMOSPHERIC PRESSURE;
ATMOSPHERICS;
CARBON FILMS;
DIAMOND FILMS;
DIAMOND LIKE CARBON FILMS;
DIAMONDS;
DIELECTRIC DEVICES;
ELECTRIC FIELDS;
ETCHING;
FIELD EMISSION;
FLOW CONTROL;
GAS PERMEABLE MEMBRANES;
GASES;
HELIUM;
HYDROGEN;
LIGHTING;
OXIDE FILMS;
OXIDE MINERALS;
PLASMA ACCELERATORS;
PLASMA DEPOSITION;
PLASMA JETS;
PLASMA SOURCES;
QUARTZ;
SEMICONDUCTING SILICON COMPOUNDS;
THIN FILMS;
TIN;
TITANIUM COMPOUNDS;
ELECTRIC DISCHARGES;
|
|
EID: 65449148590
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2009.02.047 Document Type: Article |
|
Times cited : (28)
|
|
References (13)
|
