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Volumn 103, Issue , 2016, Pages 38-44

Cleaning of carbon materials from flat surfaces and castellation gaps by an atmospheric pressure plasma jet

Author keywords

Atmospheric pressure plasma; Carbon erosion; Cleaning in gaps; Plasma jet; plasma torch; Wall cleaning

Indexed keywords

AMMONIA; AMORPHOUS CARBON; AMORPHOUS FILMS; AMORPHOUS SILICON; ATMOSPHERIC PRESSURE; CARBON FILMS; CLEANING; EROSION; HYDROGENATION; NITROGEN; NITROGEN PLASMA; NITROGEN REMOVAL; PLASMA JETS; PLASMA TORCHES;

EID: 84959503493     PISSN: 09203796     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.fusengdes.2015.12.024     Document Type: Article
Times cited : (11)

References (32)
  • 17
    • 84878892788 scopus 로고    scopus 로고
    • Plasma Sources Sci
    • F.L. Tabarés Plasma Sources Sci Technol. 22 2013 033001
    • (2013) Technol. , vol.22 , pp. 033001
    • Tabarés, F.L.1
  • 18
    • 84959545057 scopus 로고    scopus 로고
    • Quorum technologies, Plasma Etching/Ashing, England, n.d
    • Quorum technologies, Plasma Etching/Ashing, England, n.d.
  • 27
    • 84959577147 scopus 로고    scopus 로고
    • Springer Berlin Heidelberg, Berlin, Heidelberg, n.d.
    • W. Jacob, J. Roth, in Sputtering Part. Bombard., Springer Berlin Heidelberg, Berlin, Heidelberg, n.d., 329-400.
    • Sputtering Part. Bombard. , pp. 329-400
    • Jacob, W.1    Roth, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.