Atmospheric pressure barrier discharge deposition of silica-like films on polymeric substrates

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Starostine, Sergei ^a   Aldea, Eugen ^b   de Vries, Hindrik ^b   Creatore, Mariadriana ^a   van de Sanden, M C M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b TRL   (Netherlands)

Author keywords

Atmospheric pressure glow discharges (APGD); ATR FT IR; Barrier; FT IR; Plasma enhanced chemical vapor deposition (PECVD); Roll to roll reactor; Silicon oxide

Indexed keywords

ATMOSPHERIC PRESSURE GLOW DISCHARGES (APGD); ATR FT-IR; BARRIER; FT-IR; PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); ROLL-TO-ROLL REACTOR;

ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; COATINGS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLOW DISCHARGES; PLASMA DEPOSITION; PLASMAS; POLYMERS; SILICA; SILICON OXIDES; VAPORS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 40549110004     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200731203     Document Type: Conference Paper

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