SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 19, Issue 10, 2010, Pages 1263-1272

Fabrication technology for single-material MEMS using polycrystalline diamond

(2) Cao, Zongliang a Aslam, Dean a

a IEEE (United States)

Author keywords

Dry etching; Electrical conductivity; Polycrystalline diamond; Single material MEMS

Indexed keywords

DOPING LEVELS; ELECTRICAL CONDUCTIVITY; FABRICATION PROCESS; FABRICATION TECHNOLOGIES; HIGH SELECTIVITY; LARGE BAND; MASKING MATERIAL; MEMS PROCESS; MEMS-STRUCTURE; MULTILAYER STRUCTURES; POLY-C FILMS; POLYCRYSTALLINE DIAMONDS; SACRIFICIAL LAYER; SINGLE CRYSTAL DIAMOND; SINGLE-MATERIAL MEMS;

CONDUCTIVE FILMS; DIAMONDS; ELECTRIC CONDUCTIVITY; ELECTRONIC EQUIPMENT MANUFACTURE; FABRICATION; MATERIALS; MULTILAYER FILMS; MULTILAYERS; PHOTOLITHOGRAPHY; PLASMA ETCHING; SILICON COMPOUNDS;

DRY ETCHING;

EID: 77956058639 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2010.06.005 Document Type: Article

Times cited : (26)

References (117)

1
- 0036120479
- J. Wang, J.E. Butler, D.S.Y. Hsu, and C.T.-C. Nguyen 15th Int. IEEE Microelectromechanical Systems Conf., Las Vegas 2002 657
- (2002) 15th Int. IEEE Microelectromechanical Systems Conf., Las Vegas , pp. 657
- Wang, J.¹ Butler, J.E.² Hsu, D.S.Y.³ Nguyen, C.T.-C.⁴

2
- 3042742341
- J. Wang, J.E. Butler, T. Feygelson, and C.T.-C. Nguyen 17th Int. IEEE Microelectromechanical Systems Conf., Masstricht, The Netherland 2004 641
- (2004) 17th Int. IEEE Microelectromechanical Systems Conf., Masstricht, the Netherland , pp. 641
- Wang, J.¹ Butler, J.E.² Feygelson, T.³ Nguyen, C.T.-C.⁴

3
- 2542499209
- N. Sepulveda, and D.M. Aslam Microelectron. Eng. 73-74 2004 435
- (2004) Microelectron. Eng. , vol.7374 , pp. 435
- Sepulveda, N.¹ Aslam, D.M.²

4
- 33644914478
- N. Sepulveda, D.M. Aslam, and J.P. Sullivan Diamond Relat. Mater. 15 2006 398
- (2006) Diamond Relat. Mater. , vol.15 , pp. 398
- Sepulveda, N.¹ Aslam, D.M.² Sullivan, J.P.³

5
- 64649100619
- N. Sepulveda, J. Lu, D.M. Aslam, and J.P. Sullivan J. Microelectromech. Syst. 17 2008 473
- (2008) J. Microelectromech. Syst. , vol.17 , pp. 473
- Sepulveda, N.¹ Lu, J.² Aslam, D.M.³ Sullivan, J.P.⁴

6
- 77956061515
- M. Imboden, P. Mohanty, A. Gaidarzhy, J. Rankin, and B.W. Sheldon Appl. Phys. Lett. 90 2007 1
- (2007) Appl. Phys. Lett. , vol.90 , pp. 1
- Imboden, M.¹ Mohanty, P.² Gaidarzhy, A.³ Rankin, J.⁴ Sheldon, B.W.⁵

7
- 0028525073
- I. Taher, D.M. Aslam, M.A. Tamor, T.J. Potter, and R.C. Elder Sens. Actuators, A 45 1994 35
- (1994) Sens. Actuators, A , vol.45 , pp. 35
- Taher, I.¹ Aslam, D.M.² Tamor, M.A.³ Potter, T.J.⁴ Elder, R.C.⁵

8
- 0003071863
- J.L. Davidson, D.R. Wur, W.P. Kang, D.L. Kinser, and D.V. Kerns Diamond Relat. Mater. 5 1996 86
- (1996) Diamond Relat. Mater. , vol.5 , pp. 86
- Davidson, J.L.¹ Wur, D.R.² Kang, W.P.³ Kinser, D.L.⁴ Kerns, D.V.⁵

9
- 15844419754
- A. Yamamoto, N. Nawachi, T. Tsutsumoto, H. Nishiie, and T. Asahi New Diamond Front. Carbon Technol. 15 2005 1
- (2005) New Diamond Front. Carbon Technol. , vol.15 , pp. 1
- Yamamoto, A.¹ Nawachi, N.² Tsutsumoto, T.³ Nishiie, H.⁴ Asahi, T.⁵

10
- 18444402518
- A. Yamamoto, N. Nawachi, T. Tsutsumoto, and A. Terayama Diamond Relat. Mater. 14 2005 657
- (2005) Diamond Relat. Mater. , vol.14 , pp. 657
- Yamamoto, A.¹ Nawachi, N.² Tsutsumoto, T.³ Terayama, A.⁴

11
- 0030150771
- G.S. Yang, and D.M. Aslam IEEE Electron Device Lett. 17 1996 250
- (1996) IEEE Electron Device Lett. , vol.17 , pp. 250
- Yang, G.S.¹ Aslam, D.M.²

12
- 0027580645
- J.G. Ran, C.Q. Zheng, J. Ren, and S.M. Hong Diamond Relat. Mater. 2 1993 793
- (1993) Diamond Relat. Mater. , vol.2 , pp. 793
- Ran, J.G.¹ Zheng, C.Q.² Ren, J.³ Hong, S.M.⁴

13
- 0028482907
- W.P. Kang, Y. Gurbuz, J.L. Davidson, and D.V. Kerns J. Electrochem. Soc. 141 1994 2231
- (1994) J. Electrochem. Soc. , vol.141 , pp. 2231
- Kang, W.P.¹ Gurbuz, Y.² Davidson, J.L.³ Kerns, D.V.⁴

14
- 0042138204
- Y. Gurbuz, W.P. Kang, J.L. Davidson, D.L. Kinser, and D.V. Kerns Sens. Actuators, B 33 1996 100
- (1996) Sens. Actuators, B , vol.33 , pp. 100
- Gurbuz, Y.¹ Kang, W.P.² Davidson, J.L.³ Kinser, D.L.⁴ Kerns, D.V.⁵

15
- 2342475757
- Y. Gurbuz, W.P. Kang, J.L. Davidson, and D.V. Kerns Sens. Actuators, B 99 2004 207
- (2004) Sens. Actuators, B , vol.99 , pp. 207
- Gurbuz, Y.¹ Kang, W.P.² Davidson, J.L.³ Kerns, D.V.⁴

16
- 21544478910
- K. Okana, k. Hoshina, and M. Lida Appl. Phys. Lett. 64 1994 2742
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2742
- Okana, K.¹ Hoshina, K.² Lida, M.³

17
- 0032630464
- D. Hong, and D.M. Aslam IEEE Trans. Electron Dev. 46 1999 787
- (1999) IEEE Trans. Electron Dev. , vol.46 , pp. 787
- Hong, D.¹ Aslam, D.M.²

18
- 55149112111
- K. Subramanian, W.P. Kang, and J.L. Davidson IEEE Electron Device Lett. 29 2008 1259
- (2008) IEEE Electron Device Lett. , vol.29 , pp. 1259
- Subramanian, K.¹ Kang, W.P.² Davidson, J.L.³

19
- 59849095026
- B.R. Huang, T.H. Wu, S. Jou, W.R. Chen, J.F. Hsu, and C.S. Yeh Diamond Relat. Mater. 18 2009 235
- (2009) Diamond Relat. Mater. , vol.18 , pp. 235
- Huang, B.R.¹ Wu, T.H.² Jou, S.³ Chen, W.R.⁴ Hsu, J.F.⁵ Yeh, C.S.⁶

20
- 33644922949
- Y. Tang, and D.M. Aslam Diamond Relat. Mater. 15 2006 199
- (2006) Diamond Relat. Mater. , vol.15 , pp. 199
- Tang, Y.¹ Aslam, D.M.²

21
- 67549114998
- H.Y. Chan, D.M. Aslam, J. Wiler, and B. Casey J. Microelectromech. Syst. 18 2009 511
- (2009) J. Microelectromech. Syst. , vol.18 , pp. 511
- Chan, H.Y.¹ Aslam, D.M.² Wiler, J.³ Casey, B.⁴

22
- 3142716687
- X. Zhu, D.M. Aslam, Y. Tang, B.H. Stark, and K. Najafi J. Microelectromech. Syst. 13 2004 396
- (2004) J. Microelectromech. Syst. , vol.13 , pp. 396
- Zhu, X.¹ Aslam, D.M.² Tang, Y.³ Stark, B.H.⁴ Najafi, K.⁵

23
- 33644883052
- X. Zhu, and D.M. Aslam Diamond Relat. Mater. 15 2006 254
- (2006) Diamond Relat. Mater. , vol.15 , pp. 254
- Zhu, X.¹ Aslam, D.M.²

24
- 33751176674
- X. Zhu, D.M. Aslam, and J.P. Sullivan Diamond Relat. Mater. 15 2006 2068
- (2006) Diamond Relat. Mater. , vol.15 , pp. 2068
- Zhu, X.¹ Aslam, D.M.² Sullivan, J.P.³

25
- 0026172072
- R. Ramesham, T. Roppel, and C. Ellis J. Electrochem. Soc. 138 1991 1706
- (1991) J. Electrochem. Soc. , vol.138 , pp. 1706
- Ramesham, R.¹ Roppel, T.² Ellis, C.³

26
- 0037222230
- S. Guillaudeu, X. Zhu, and D.M. Aslam Diamond Relat. Mater. 12 2003 65
- (2003) Diamond Relat. Mater. , vol.12 , pp. 65
- Guillaudeu, S.¹ Zhu, X.² Aslam, D.M.³

27
- 0035499507
- A.R. Krauss, O. Auciello, D.M. Gruen, A. Jayatissa, A. Sumant, J. Tucek, D.C. Mancini, N. Moldovan, A. Erdemir, D. Ersoy, M.N. Gardos, H.G. Busmann, E.M. Meyer, and M.Q. Ding Diamond Relat. Mater. 10 2001 1952
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1952
- Krauss, A.R.¹ Auciello, O.² Gruen, D.M.³ Jayatissa, A.⁴ Sumant, A.⁵ Tucek, J.⁶ Mancini, D.C.⁷ Moldovan, N.⁸ Erdemir, A.⁹ Ersoy, D.¹⁰ Gardos, M.N.¹¹ Busmann, H.G.¹² Meyer, E.M.¹³ Ding, M.Q.¹⁴

28
- 48849096989
- O.A. Williams, M. Nesladek, M. Daenen, S. Michaelson, A. Hoffman, E. Osawa, K. Haenen, and R.B. Jackman Diamond Relat. Mater. 17 2008 1080
- (2008) Diamond Relat. Mater. , vol.17 , pp. 1080
- Williams, O.A.¹ Nesladek, M.² Daenen, M.³ Michaelson, S.⁴ Hoffman, A.⁵ Osawa, E.⁶ Haenen, K.⁷ Jackman, R.B.⁸

29
- 18444403454
- R. Muller, R. Gronmaier, K. Janischowsky, J. Kusterer, and E. Kohn Diamond Relat. Mater. 14 2005 504
- (2005) Diamond Relat. Mater. , vol.14 , pp. 504
- Muller, R.¹ Gronmaier, R.² Janischowsky, K.³ Kusterer, J.⁴ Kohn, E.⁵

30
- 36448998657
- G.S. Yang, and D.M. Aslam Appl. Phys. Lett. 66 1995 311
- (1995) Appl. Phys. Lett. , vol.66 , pp. 311
- Yang, G.S.¹ Aslam, D.M.²

31
- 27144449705
- Y. Tang, and D.M. Aslam J. Vac. Sci. Techol. 23 2005 1088
- (2005) J. Vac. Sci. Techol. , vol.23 , pp. 1088
- Tang, Y.¹ Aslam, D.M.²

32
- 50749134462
- E.J. Bienk, and S.S. Eskildsen Diamond Relat. Mater. 2 1996 432
- (1996) Diamond Relat. Mater. , vol.2 , pp. 432
- Bienk, E.J.¹ Eskildsen, S.S.²

33
- 0014800514
- W. Kern, and D.A. Puotinen RCA Rev. 31 1970 187
- (1970) RCA Rev. , vol.31 , pp. 187
- Kern, W.¹ Puotinen, D.A.²

34
- 36449006342
- H. Windischmann, G.F. Epps, Y. Cong, and R.W. Collins J. Appl. Phys. 69 1991 2231
- (1991) J. Appl. Phys. , vol.69 , pp. 2231
- Windischmann, H.¹ Epps, G.F.² Cong, Y.³ Collins, R.W.⁴

35
- 0004114845
- Wiley New York
- Halliday, Resnick, and Walker Fifth Edition of Fundamentals of Physics Extended 1997 Wiley New York
- (1997) Fifth Edition of Fundamentals of Physics Extended
- Halliday¹ Resnick² Walker³

36
- 0004173989
- William Andrew Publishing/Noyes
- H.O. Pierson Handbook of Carbon, Graphite, Diamond and Fullerenes - Properties, Processing and Applications 2004 William Andrew Publishing/Noyes
- (2004) Handbook of Carbon, Graphite, Diamond and Fullerenes - Properties, Processing and Applications
- Pierson, H.O.¹

37
- 77956056968
- Azom
- Chris Beck, and Mahsood Ahmed Diamond - Chemically Vapour Deposited Diamond 2004 Azom
- (2004) Diamond - Chemically Vapour Deposited Diamond
- Beck, C.¹ Ahmed, M.²

38
- 36549091515
- M.I. Landstrass, and K.V. Ravi Appl. Phys. Lett. 55 1989 975
- (1989) Appl. Phys. Lett. , vol.55 , pp. 975
- Landstrass, M.I.¹ Ravi, K.V.²

39
- 36549090545
- A.P. Sommer, D. Zhu, and K. Brühne Cryst. Growth Des. 7 2007 2298
- (2007) Cryst. Growth Des. , vol.7 , pp. 2298
- Sommer, A.P.¹ Zhu, D.² Brühne, K.³

40
- 0035828734
- J. Ristein, M. Riedel, F. Maier, B.F. Mantel, M. Stammler, and L. Ley J. Phys.: Condens. Matter 13 2001 8979
- (2001) J. Phys.: Condens. Matter , vol.13 , pp. 8979
- Ristein, J.¹ Riedel, M.² Maier, F.³ Mantel, B.F.⁴ Stammler, M.⁵ Ley, L.⁶

41
- 0037349815
- E. Snidero, D. Tromson, C. Mer, P. Bergonzo, J.S. Foord, C. Nebel, O.A. Williams, and R.B. Jackman J. Appl. Phys. 93 2003 2700
- (2003) J. Appl. Phys. , vol.93 , pp. 2700
- Snidero, E.¹ Tromson, D.² Mer, C.³ Bergonzo, P.⁴ Foord, J.S.⁵ Nebel, C.⁶ Williams, O.A.⁷ Jackman, R.B.⁸

42
- 0000066962
- Y. Liou, R. Weimer, D. Knight, and R. Messier Appl. Phys. Lett. 56 1990 437
- (1990) Appl. Phys. Lett. , vol.56 , pp. 437
- Liou, Y.¹ Weimer, R.² Knight, D.³ Messier, R.⁴

43
- 0025519001
- Y. Liou, A. Inspektor, R. Wermer, D. Knight, and R. Messier J. Mater. Res. 5 1990 2305
- (1990) J. Mater. Res. , vol.5 , pp. 2305
- Liou, Y.¹ Inspektor, A.² Wermer, R.³ Knight, D.⁴ Messier, R.⁵

44
- 21544483324
- K. Takeuchi, and T. Yoshida J. Appl. Phys. 71 1992 2636
- (1992) J. Appl. Phys. , vol.71 , pp. 2636
- Takeuchi, K.¹ Yoshida, T.²

45
- 0041340060
- S.I. Shah, and M.M. Walte Appl. Phys. Lett. 61 1992 3113
- (1992) Appl. Phys. Lett. , vol.61 , pp. 3113
- Shah, S.I.¹ Walte, M.M.²

46
- 0031193146
- C. Gómez-Aleixandre, M.M. Garciá, O. Sánchez, and J.M. Albella Thin Solid Films 303 1997 34
- (1997) Thin Solid Films , vol.303 , pp. 34
- Gómez-Aleixandre, C.¹ Garciá, M.M.² Sánchez, O.³ Albella, J.M.⁴

47
- 0030106639
- T.H. Borst, and O. Weis Phys. Status Solidi, A Appl. Res. 154 1996 423
- (1996) Phys. Status Solidi, A Appl. Res. , vol.154 , pp. 423
- Borst, T.H.¹ Weis, O.²

48
- 58149324048
- T.H. Borst, and O. Weis Diamond Relat. Mater. 4 1995 948
- (1995) Diamond Relat. Mater. , vol.4 , pp. 948
- Borst, T.H.¹ Weis, O.²

49
- 0242555641
- D.M. Aslam, I. Taher, and A. Masood Appl. Phys. Lett. 60 1992 2923
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2923
- Aslam, D.M.¹ Taher, I.² Masood, A.³

50
- 0027226474
- D.R. Wur, and J.L. Davidson Mater. Res. Soc. Symp. Proc. 283 1993 879
- (1993) Mater. Res. Soc. Symp. Proc. , vol.283 , pp. 879
- Wur, D.R.¹ Davidson, J.L.²

51
- 0001046662
- O. Dorsch, K. Holzner, M. Werner, E. Obermeier, R.E. Harper, C. Johnston, P.R. Chalker, and I.M. Buckley-Golder Diamond Relat. Mater. 2 1993 1096
- (1993) Diamond Relat. Mater. , vol.2 , pp. 1096
- Dorsch, O.¹ Holzner, K.² Werner, M.³ Obermeier, E.⁴ Harper, R.E.⁵ Johnston, C.⁶ Chalker, P.R.⁷ Buckley-Golder, I.M.⁸

52
- 3042980158
- M. Deguchi, N. Hase, M. Kitabatake, H. Kotera, S. Shima, and H. Sakakima Diamond Films Technol. 6 1996 77
- (1996) Diamond Films Technol. , vol.6 , pp. 77
- Deguchi, M.¹ Hase, N.² Kitabatake, M.³ Kotera, H.⁴ Shima, S.⁵ Sakakima, H.⁶

53
- 0001615142
- M. Deguchi, M. Kitabatake, and T. Hirao Diamond Relat. Mater. 5 1996 728
- (1996) Diamond Relat. Mater. , vol.5 , pp. 728
- Deguchi, M.¹ Kitabatake, M.² Hirao, T.³

54
- 0001146059
- M. Deguchi, N. Hase, M. Kitabatake, H. Kotera, S. Shima, and M. Kitagawa Diamond Relat. Mater. 6 1997 367
- (1997) Diamond Relat. Mater. , vol.6 , pp. 367
- Deguchi, M.¹ Hase, N.² Kitabatake, M.³ Kotera, H.⁴ Shima, S.⁵ Kitagawa, M.⁶

55
- 0031123749
- Y. Boiko, P. Gonon, S. Prawer, and D.N. Jamieson Mater. Sci. Eng. B46 1997 112
- (1997) Mater. Sci. Eng. , vol.46 , pp. 112
- Boiko, Y.¹ Gonon, P.² Prawer, S.³ Jamieson, D.N.⁴

56
- 0031187390
- W.L. Wang, X. Jiang, K. Taube, and C.-P. Klages J. Appl. Phys. 82 1997 729
- (1997) J. Appl. Phys. , vol.82 , pp. 729
- Wang, W.L.¹ Jiang, X.² Taube, K.³ Klages, C.-P.⁴

57
- 0012827444
- L. Fang, W.L. Wang, P.D. Ding, K.J. Liao, and J. Wang J. Appl. Phys. 86 1999 5185
- (1999) J. Appl. Phys. , vol.86 , pp. 5185
- Fang, L.¹ Wang, W.L.² Ding, P.D.³ Liao, K.J.⁴ Wang, J.⁵

58
- 0035449304
- M. Adamschik, R. Müller, P. Gluche, A. Flöter, W. Limmer, R. Sauer, and E. Kohm Diamond Relat. Mater. 10 2001 1670
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1670
- Adamschik, M.¹ Müller, R.² Gluche, P.³ Flöter, A.⁴ Limmer, W.⁵ Sauer, R.⁶ Kohm, E.⁷

59
- 2442532883
- A. Yamamoto, and T. Tsutsumoto Diamond Relat. Mater. 13 2004 863
- (2004) Diamond Relat. Mater. , vol.13 , pp. 863
- Yamamoto, A.¹ Tsutsumoto, T.²

60
- 34249084941
- A. Yamamoto, N. Norio, and T. Takahiro Diamond Relat. Mater. 16 2007 1670
- (2007) Diamond Relat. Mater. , vol.16 , pp. 1670
- Yamamoto, A.¹ Norio, N.² Takahiro, T.³

61
- 69249208536
- P. Kulha, A. Kromka, O. Babchenko, M. Vanecek, M. Husak, O.A. Williams, and K. Haenen Vacuum 8 2009 53
- (2009) Vacuum , vol.8 , pp. 53
- Kulha, P.¹ Kromka, A.² Babchenko, O.³ Vanecek, M.⁴ Husak, M.⁵ Williams, O.A.⁶ Haenen, K.⁷

62
- 0032315634
- S. Sahli, and D.M. Aslam Sens. Actuators, A 71 1998 193
- (1998) Sens. Actuators, A , vol.71 , pp. 193
- Sahli, S.¹ Aslam, D.M.²

63
- 77956062605
- Z. Cao, and D.M. Aslam IEEE Nanotechnology Materials and Devices Conference 2009
- (2009) IEEE Nanotechnology Materials and Devices Conference
- Cao, Z.¹ Aslam, D.M.²

64
- 0000776327
- Mo Yokoba, Yasuo Koide, A. Otsuki, F. Ako, T. Oku, and M. Murakami J. Appl. Phys. 81 1997 6815
- (1997) J. Appl. Phys. , vol.81 , pp. 6815
- Yokoba, M.¹ Koide, Y.² Otsuki, A.³ Ako, F.⁴ Oku, T.⁵ Murakami, M.⁶

65
- 0001524611
- P.E. Viljoen, E.S. Lambers, and P.H. Holloway J. Vac. Sci. Technol. B 12 1994 2997
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 2997
- Viljoen, P.E.¹ Lambers, E.S.² Holloway, P.H.³

66
- 0029345526
- M. Werne, O. Dorsch, H.-U. Baerwind, E. Obermeier, C. Johnston, P.R. Chalker, and S. Romani IEEE Trans. Electron Devices 42 1995 1344
- (1995) IEEE Trans. Electron Devices , vol.42 , pp. 1344
- Werne, M.¹ Dorsch, O.² Baerwind, H.-U.³ Obermeier, E.⁴ Johnston, C.⁵ Chalker, P.R.⁶ Romani, S.⁷

67
- 0030194894
- G.L. Waytena, and H.A. Hoff J. Electrochem. Soc. 143 1996 2392
- (1996) J. Electrochem. Soc. , vol.143 , pp. 2392
- Waytena, G.L.¹ Hoff, H.A.²

68
- 22844445552
- Y. Chen, M. Ogura, S. Yamasaki, and H. Okushi Semicond. Sci. Technol. 20 2005 860
- (2005) Semicond. Sci. Technol. , vol.20 , pp. 860
- Chen, Y.¹ Ogura, M.² Yamasaki, S.³ Okushi, H.⁴

69
- 77956063566
- D.I. Ma II, P. Isaacson, M.L. Rebbert, K. Harris, J.S. Suehle, H.A. Hoff, G.L. Waytena, and C.I. Vold Diamond Relat. Mater 5 1996 1450
- (1996) Diamond Relat. Mater , vol.5 , pp. 1450
- Ma II, D.I.¹ Isaacson, P.² Rebbert, M.L.³ Harris, K.⁴ Suehle, J.S.⁵ Hoff, H.A.⁶ Waytena, G.L.⁷ Vold, C.I.⁸

70
- 0001592050
- J. Nakanishi, A. Otsuki, and T. Oku J. Appl. Phys. 76 1994 2293
- (1994) J. Appl. Phys. , vol.76 , pp. 2293
- Nakanishi, J.¹ Otsuki, A.² Oku, T.³

71
- 0011778455
- S. Sahli, and D.M. Aslam Appl. Phys. Lett. 70 1997 2129
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2129
- Sahli, S.¹ Aslam, D.M.²

72
- 0026260758
- A. Masood, M. Aslam, M.A. Tamor, and T.J. Potter J. Electrochem. Soc. 138 1991 67
- (1991) J. Electrochem. Soc. , vol.138 , pp. 67
- Masood, A.¹ Aslam, M.² Tamor, M.A.³ Potter, T.J.⁴

73
- 0028538767
- S. Katsumata, Y. Oobuchi, and T. Asano Diamond Relat. Mater. 3 1994 1296
- (1994) Diamond Relat. Mater. , vol.3 , pp. 1296
- Katsumata, S.¹ Oobuchi, Y.² Asano, T.³

74
- 36449006404
- X. Jiang, E. Boettger, M. Paul, and C.P. Klages Appl. Phys. Lett. 65 1994 1519
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1519
- Jiang, X.¹ Boettger, E.² Paul, M.³ Klages, C.P.⁴

75
- 0035449803
- H. Liu, C. Gao, X. Li, C. Wang, Y. Han, and G. Zou Diamond Relat. Mater. 10 2001 1573
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1573
- Liu, H.¹ Gao, C.² Li, X.³ Wang, C.⁴ Han, Y.⁵ Zou, G.⁶

76
- 0037427588
- Y. Fu, H. Du, and J. Miao J. Mater. Process. Technol. 132 2003 73
- (2003) J. Mater. Process. Technol. , vol.132 , pp. 73
- Fu, Y.¹ Du, H.² Miao, J.³

77
- 0029305648
- G.S. Yang, D.M. Aslam, K.P. Kuo, D.K. Reinhard, and J. Asmussen J. Vac. Sci. Technol. B 13 1995 1030
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1030
- Yang, G.S.¹ Aslam, D.M.² Kuo, K.P.³ Reinhard, D.K.⁴ Asmussen, J.⁵

78
- 50149101787
- H.-Y. Chan, D.M. Aslam, S.H. Wang, G.M. Swain, and K.D. Wise 21st International Conference on Microelectromechanical Systems 2008 244
- (2008) 21st International Conference on Microelectromechanical Systems , pp. 244
- Chan, H.-Y.¹ Aslam, D.M.² Wang, S.H.³ Swain, G.M.⁴ Wise, K.D.⁵

79
- 0021197208
- N.N. Efremow, M.W. Geis, D.C. Flanders, G.A. Lincoln, and N.P. Economou J. Vac. Sci. Technol. B 3 1985 416
- (1985) J. Vac. Sci. Technol. B , vol.3 , pp. 416
- Efremow, N.N.¹ Geis, M.W.² Flanders, D.C.³ Lincoln, G.A.⁴ Economou, N.P.⁵

80
- 0036508484
- P.W. Leech, G.K. Reeves, A.S. Holland, and F. Shanks Diamond Relat. Mater. 11 2002 833
- (2002) Diamond Relat. Mater. , vol.11 , pp. 833
- Leech, P.W.¹ Reeves, G.K.² Holland, A.S.³ Shanks, F.⁴

81
- 0005355875
- G.S. Sandhu, and W.K. Chu Appl. Phys. Lett. 55 1989 437
- (1989) Appl. Phys. Lett. , vol.55 , pp. 437
- Sandhu, G.S.¹ Chu, W.K.²

82
- 0007957274
- O. Dorsch, M. Werner, and E. Obermeier Diamond Relat. Mater. 4 1995 456
- (1995) Diamond Relat. Mater. , vol.4 , pp. 456
- Dorsch, O.¹ Werner, M.² Obermeier, E.³

83
- 0002469286
- C. Vivensang, L. Ferlazzo-Manin, and M.F. Ravet Diamond Relat. Mater. 5 1996 840
- (1996) Diamond Relat. Mater. , vol.5 , pp. 840
- Vivensang, C.¹ Ferlazzo-Manin, L.² Ravet, M.F.³

84
- 0042764725
- G.M.R. Sirineni, H.A. Naseem, A.P. Malshe, and W.D. Brown Diamond Relat. Mater. 6 1997 952
- (1997) Diamond Relat. Mater. , vol.6 , pp. 952
- Sirineni, G.M.R.¹ Naseem, H.A.² Malshe, A.P.³ Brown, W.D.⁴

85
- 0031382197
- H. Shiomi Jpn. J. Appl. Phys. 36 1997 7745
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 7745
- Shiomi, H.¹

86
- 0034174605
- E.-S. Baik, and Y.-J. Baik J. Mater. Res. 15 2000 923
- (2000) J. Mater. Res. , vol.15 , pp. 923
- Baik, E.-S.¹ Baik, Y.-J.²

87
- 18844464900
- E.-S. Baik, Y.-J. Baik, and D. Jeon Thin Solid Films 377-378 2000 299
- (2000) Thin Solid Films , vol.377-378 , pp. 299
- Baik, E.-S.¹ Baik, Y.-J.² Jeon, D.³

88
- 18844465851
- E.-S. Baik, Y.-J. Baik, S.W. Lee, and D. Jeon Thin Solid Films 377-378 2000 295
- (2000) Thin Solid Films , vol.377-378 , pp. 295
- Baik, E.-S.¹ Baik, Y.-J.² Lee, S.W.³ Jeon, D.⁴

89
- 0033892148
- T. Shibata, Y. Kitamoto, K. Unno, and E. Makino J. Microelectromech. Syst. 9 2000 47
- (2000) J. Microelectromech. Syst. , vol.9 , pp. 47
- Shibata, T.¹ Kitamoto, Y.² Unno, K.³ Makino, E.⁴

90
- 84968833145
- R. Otterbach, U. Hilleringmann, and K. Goser Industrial Electronics Society Conference 3 2000 1873
- (2000) Industrial Electronics Society Conference , vol.3 , pp. 1873
- Otterbach, R.¹ Hilleringmann, U.² Goser, K.³

91
- 0035448758
- Y. Nishibayashi, Y. Ando, H. Saito, T. Imai, T. Hirao, and K. Oura Diamond Relat. Mater. 10 2001 1732
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1732
- Nishibayashi, Y.¹ Ando, Y.² Saito, H.³ Imai, T.⁴ Hirao, T.⁵ Oura, K.⁶

92
- 0035878427
- P.W. Leech, G.K. Reeves, and A. Holland J. Mater. Sci. 36 2001 3453
- (2001) J. Mater. Sci. , vol.36 , pp. 3453
- Leech, P.W.¹ Reeves, G.K.² Holland, A.³

93
- 0037427588
- Y. Fu, H. Du, and J. Miao J. Mater. Process. Technol. 132 2003 73
- (2003) J. Mater. Process. Technol. , vol.132 , pp. 73
- Fu, Y.¹ Du, H.² Miao, J.³

94
- 0037201028
- X. Wang, G. Hong, J. Zhang, B. Lin, H. Gong, and W. Wang J. Mater. Process. Technol. 127 2002 230
- (2002) J. Mater. Process. Technol. , vol.127 , pp. 230
- Wang, X.¹ Hong, G.² Zhang, J.³ Lin, B.⁴ Gong, H.⁵ Wang, W.⁶

95
- 0036508303
- Y. Ando, Y. Nishibayashi, K. Kobashi, T. Hirao, and K. Oura Diamond Relat. Mater. 11 2002 824
- (2002) Diamond Relat. Mater. , vol.11 , pp. 824
- Ando, Y.¹ Nishibayashi, Y.² Kobashi, K.³ Hirao, T.⁴ Oura, K.⁵

96
- 2442424133
- Y. Ando, Y. Nishibayashi, and A. Sawabe Diamond Relat. Mater. 13 2004 633
- (2004) Diamond Relat. Mater. , vol.13 , pp. 633
- Ando, Y.¹ Nishibayashi, Y.² Sawabe, A.³

97
- 33644921236
- C.Y. Li, and A. Hatta Diamond Relat. Mater. 15 2006 357
- (2006) Diamond Relat. Mater. , vol.15 , pp. 357
- Li, C.Y.¹ Hatta, A.²

98
- 21344442899
- G.F. Ding, H.P. Mao, Y.L. Cai, Y.H. Zhang, X. Yao, and X.L. Zhao Diamond Relat. Mater. 14 2005 1543
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1543
- Ding, G.F.¹ Mao, H.P.² Cai, Y.L.³ Zhang, Y.H.⁴ Yao, X.⁵ Zhao, X.L.⁶

99
- 27744522344
- C.Y. Li, and A. Hatta Diamond Relat. Mater. 14 2005 1780
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1780
- Li, C.Y.¹ Hatta, A.²

100
- 33847028400
- C.Y. Li, and A. Hatta Thin Sold Films 515 2007 4172
- (2007) Thin Sold Films , vol.515 , pp. 4172
- Li, C.Y.¹ Hatta, A.²

101
- 48849108539
- M.D. Stoikou, P. John, and J.I.B. Wilson Diamond Relat. Mater. 17 2008 1164
- (2008) Diamond Relat. Mater. , vol.17 , pp. 1164
- Stoikou, M.D.¹ John, P.² Wilson, J.I.B.³

102
- 0026914936
- S.A. Grot, G.Sh. Gildenblat, and A.R. Badzian IEEE Electron Device Lett. 13 1992 462
- (1992) IEEE Electron Device Lett. , vol.13 , pp. 462
- Grot, S.A.¹ Gildenblat, G.Sh.² Badzian, A.R.³

103
- 0026851972
- S.J. Pearton, A. Katz, F. Ren, and J.R. Lothian Electron. Lett. 28 1992 822
- (1992) Electron. Lett. , vol.28 , pp. 822
- Pearton, S.J.¹ Katz, A.² Ren, F.³ Lothian, J.R.⁴

104
- 0000281802
- S.A. Grot, R.A. Ditizio, G.Sh. Gildenblat, A.R. Badzian, and S.J. Fonash Appl. Phys. Lett. 61 1992 2326
- (1992) Appl. Phys. Lett. , vol.61 , pp. 2326
- Grot, S.A.¹ Ditizio, R.A.² Gildenblat, G.Sh.³ Badzian, A.R.⁴ Fonash, S.J.⁵

105
- 0033310848
- S. Kiyahara, Y. Yagi, and K. Mori Nanotechnology 10 1999 385
- (1999) Nanotechnology , vol.10 , pp. 385
- Kiyahara, S.¹ Yagi, Y.² Mori, K.³

106
- 0036508394
- M. Bernard, A. Deneuville, T. Lagarde, E. Treboux, J. Pelletier, P. Muret, N. Casanova, and E. Gheeraert Diamond Relat. Mater. 11 2002 828
- (2002) Diamond Relat. Mater. , vol.11 , pp. 828
- Bernard, M.¹ Deneuville, A.² Lagarde, T.³ Treboux, E.⁴ Pelletier, J.⁵ Muret, P.⁶ Casanova, N.⁷ Gheeraert, E.⁸

107
- 1542378096
- M. Bernard, A. Deneuville, L. Ortega, K. Ayadi, and P. Muret Diamond Relat. Mater. 13 2004 287
- (2004) Diamond Relat. Mater. , vol.13 , pp. 287
- Bernard, M.¹ Deneuville, A.² Ortega, L.³ Ayadi, K.⁴ Muret, P.⁵

108
- 42949147097
- D.T. Tran, T.A. Grotjohn, D.K. Reinhard, and J. Asmussen Diamond Relat. Mater. 17 2008 717
- (2008) Diamond Relat. Mater. , vol.17 , pp. 717
- Tran, D.T.¹ Grotjohn, T.A.² Reinhard, D.K.³ Asmussen, J.⁴

109
- 7544219933
- D.S. Hwang, T. Saito, and N. Fujimori Diamond Relat. Mater. 13 2004 2207
- (2004) Diamond Relat. Mater. , vol.13 , pp. 2207
- Hwang, D.S.¹ Saito, T.² Fujimori, N.³

110
- 21144436880
- J. Enlund, J. Isberg, M. Karlsson, F. Nikolajeff, J. Olsson, and D.J. Twitchen Carbon 43 2005 1839
- (2005) Carbon , vol.43 , pp. 1839
- Enlund, J.¹ Isberg, J.² Karlsson, M.³ Nikolajeff, F.⁴ Olsson, J.⁵ Twitchen, D.J.⁶

111
- 34047276464
- T. Yamada, H. Yoshikawa, H. Uetsuka, S. Kumaragurubaran, N. Tokuda, and S. Shikata Diamond Relat. Mater. 16 2007 996
- (2007) Diamond Relat. Mater. , vol.16 , pp. 996
- Yamada, T.¹ Yoshikawa, H.² Uetsuka, H.³ Kumaragurubaran, S.⁴ Tokuda, N.⁵ Shikata, S.⁶

112
- 42949159869
- H. Uetsuka, T. Yamada, and S. Shikata Diamond Relat. Mater. 17 2008 728
- (2008) Diamond Relat. Mater. , vol.17 , pp. 728
- Uetsuka, H.¹ Yamada, T.² Shikata, S.³

113
- 0028481232
- J. Rankin, R.E. Boekenhauer, R. Csencsits, and Y. Shigesato J. Mater. Res. 9 1994 2164
- (1994) J. Mater. Res. , vol.9 , pp. 2164
- Rankin, J.¹ Boekenhauer, R.E.² Csencsits, R.³ Shigesato, Y.⁴

114
- 12344335333
- J. Wang, Z. Ren, and C.T.-C. Nguyen IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 51 2004 1607
- (2004) IEEE Trans. Ultrason., Ferroelect., Freq. Contr. , vol.51 , pp. 1607
- Wang, J.¹ Ren, Z.² Nguyen, C.T.-C.³

115
- 43349104353
- Y. Xie, S. Li, Y. Lin, Z. Ren, and C.T.-C. Nguyen IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 55 2008 890
- (2008) IEEE Trans. Ultrason., Ferroelect., Freq. Contr. , vol.55 , pp. 890
- Xie, Y.¹ Li, S.² Lin, Y.³ Ren, Z.⁴ Nguyen, C.T.-C.⁵

116
- 36449006342
- H. Windischmann, and G.F. Epps J. Appl. Phys. 69 1991 2231
- (1991) J. Appl. Phys. , vol.69 , pp. 2231
- Windischmann, H.¹ Epps, G.F.²

117
- 77956058500
- Z. Cao, and D.M. Aslam 5th Int. Conf. on Nano/Micro Engineered and Molecular Systems 2010
- (2010) 5th Int. Conf. on Nano/Micro Engineered and Molecular Systems
- Cao, Z.¹ Aslam, D.M.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.