The application of polycrystalline diamond in a thin film packaging process for MEMS resonators

Diamond and Related Materials

Volumn 15, Issue 11-12 SPEC. ISS., 2006, Pages 2068-2072

  Zhu, Xiangwei ^a   Aslam, Dean M ^a   Sullivan, John P ^b  

^a Michigan State University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Diamond; Integrated; MEMS; Resonator; Thin film package

Indexed keywords

DIAMONDS; ENCAPSULATION; PIEZOELECTRICITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESONATORS; THIN FILMS;

CANTILEVER BEAM RESONATORS; LASER DETECTION; SACRIFICIAL LAYERS;

POLYCRYSTALLINE MATERIALS;

EID: 33751176674     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.08.027     Document Type: Article

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