Fabrication of 2-μm wide poly-crystalline diamond channels using silicon molds for micro-fluidic applications

Diamond and Related Materials

Volumn 12, Issue 1, 2003, Pages 65-69

  Guillaudeu, S ^a   Zhu, X ^a   Aslam, D M ^a  

^a Michigan State University   (United States)

Author keywords

Biomedical applications; BioMEMS; Diamond; Free standing; MEMS; Micro structure

Indexed keywords

ELECTROPHORESIS; POLYCRYSTALLINE MATERIALS; ULTRASONIC APPLICATIONS;

ULTRASONIC STIRRING;

DIAMONDS;

DIAMOND;

EID: 0037222230     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00286-8     Document Type: Article

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