Piezoresistive properties of chemical vapor deposited p-type diamond strain gauges fabricated on diaphragm structure

Diamond and Related Materials

Volumn 5, Issue 6-8, 1996, Pages 728-731

  Deguchi, Masahiro ^a   Kitabatake, Makoto ^a   Hirao, Takashi ^b  

^a PANASONIC CORPORATION   (Japan)

^b Matsushita Technoresearch Inc   (Japan)

Author keywords

Chemical vapor deposition; Diaphragm structure; P type diamond films; Strain gauges

Indexed keywords

EID: 0001615142     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00416-5     Document Type: Article

References (7)

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