CVD polycrystalline diamond high-Q micromechanical resonators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 657-660

  Wang, Jing ^a   Butler, James E ^a   Hsu, D S Y ^a   Nguyen, Clark T C ^a  

^a University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; Q FACTOR MEASUREMENT; RESONATORS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; TRANSCEIVERS; WIRELESS TELECOMMUNICATION SYSTEMS;

CLAMPED-CLAMPED BEAM; MICROMECHANICAL RESONATORS; POLYCRYSTALLINE DIAMOND; POLYCRYSTALLINE SILICON; WIRELESS TELECOMMUNICATION TRANSCEIVERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036120479     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)