Anisotropic etching of a fine column on a single crystal diamond

Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1732-1735

  Nishibayashi, Yoshiki ^a   Ando, Yutaka ^a   Saito, Hirohisa ^b   Imai, Takahiro ^b   Hirao, Takashi ^a   Oura, Kenjirou ^a  

^a OSAKA UNIVERSITY   (Japan)

^b SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

Anisotropic etching; Diamond; Emitter array; Sharp tip; Single crystal

Indexed keywords

ANISOTROPY; PLASMA ETCHING; REACTIVE ION ETCHING; SINGLE CRYSTALS; SURFACE ROUGHNESS;

ANISOTROPIC ETCHING;

DIAMONDS;

DIAMOND;

EID: 0035448758     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00404-6     Document Type: Article

References (14)