ICP etching of polycrystalline diamonds: Fabrication of diamond nano-tips for AFM cantilevers

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 728-731

  Uetsuka, H ^a   Yamada, T ^a   Shikata, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AFM; ICP etching; Nano cell mapping; Nano tip; Polycrystalline diamond

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; INDUCTIVELY COUPLED PLASMA; POLYCRYSTALLINE MATERIALS;

AFM CANTILEVERS; NANO TIPS; POLYCRYSTALLINE DIAMONDS;

DIAMONDS;

EID: 42949159869     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.12.071     Document Type: Article

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