Fabrication and testing of a novel all-diamond neural probe for chemical detection and electrical sensing applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 244-247

  Chan, H Y ^a   Aslam, D M ^a   Wang, S H ^a   Swain, G M ^a   Wise, K D ^b  

^a MICHIGAN STATE UNIVERSITY   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; OPTICAL DESIGN; REACTIVE ION ETCHING; SILICON;

CHEMICAL DETECTION; ELECTRICAL SENSING; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; NEURAL APPLICATIONS; NEURAL PROBES; POLY-CRYSTALLINE DIAMOND;

DIAMONDS;

EID: 50149101787     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443638     Document Type: Conference Paper

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