Piezoresistive property of CVD diamond films

Diamond and Related Materials

Volumn 6, Issue 2-4, 1997, Pages 367-373

  Deguchi, Masahiro ^a   Hase, Nobuhiro ^b   Kitabatake, Makoto ^a   Kotera, Hidetoshi ^b   Shima, Susumu ^b   Kitagawa, Masatoshi ^a  

^a PANASONIC CORPORATION   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Chemical vapor deposition; Gauge factor; p type diamond films; Piezoresistive effect

Indexed keywords

EID: 0001146059     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00727-3     Document Type: Article

References (20)

1. G.A. Baraff, Phys. Rev., A26 (1964) 133.
2. A.T. Collins and A.W.S. Williams, J. Phys. C, Solid State Phys., 4 (1971) 1789.
3. J.E. Graebner, M.E. Reis, L. Seibles, T.M. Hartnett, R.P. Miller and C.J. Robinson, Phys. Rev. B, 70 (1994) 3702.
4. H.J. Mcskimin and P. Andreatch, J. Appl. Phys., 43 (1972) 2944.
5. B.V. Spitsyn, L.L. Boilov and B.V. Derjaguin, J. Cryst. Growth, 52 (1981) 219.
6. S. Matsumoto, Y. Sato, M. Kamo and N. Setaka, Jpn. J. Appl. Phys., 21 (1982) L183.
7. M. Kamo, Y. Sato, S. Matsumoto and N. Setaka, J. Cryst. Growth, 62 (1983) 642.
8. D.R. Kania, M.I. Landstrass, M.A. Plano, L.S. Pan and S. Han, Diamond Ralat. Mater., 2 (1993) 1012.
9. L.S. Pan, P. Pianrtta, D.R. Kania, O.L. Landon, K.V. Ravi and L.S. Plano, Proc. 1st Int. Symp. on Diamond and Diamond-like Films, 1990, p. 424.
10. J.P. Bade, S.R. Sahaide, B.R. Stoner, J.A. Von Windheim, J.T. Glass, K. Miyata, K. Nishimura and K. Kobashi, Diamond Relat. Mater., 2 (1993) 816.
11. J.G. Ran, C.Q. Zheng, J. Ren and M. Hong, Diamond Relat. Mater., 2 (1993) 793.
12. M. Aslam, I. Taher and A. Masood, Appl. Phys. Lett., 60 (1992) 2923.
13. I. Taher, M. Aslam, M.A. Tamor, T.J. Potter and R.C. Elder, Sensors Actuators A, 45 (1994) 35.
14. J.L. Davidson, D.R. Wur, W.P. Kang, D.L. Kinser and D.V. Kerns, Diamond Relat. Mater., 5 (1996) 86.
15. C.S. Smith, Phys. Rev., 94 (1954) 42.
16. Y. Kanda, Sensors Actuators A, 28 (1991) 83.
17. W. Wanlu, X. Jiang and C.P. Klages, Chinese Sci. Bull., 40 (1995) 209.
18. O. Dorsch, K. Holzner, M. Werner and E. Obermeier, Diamond Relat. Mater., 2 (1993) 1096.
19. M. Deguchi, Y. Mori, N. Eimori, Y. Show, M. Kitabatake, A. Hatta, T. Ito, A. Hiraki, T. Izumi and T. Hirao, Proc. 2nd Int. Conf. on Application of Diamond Films and Related Materials, MYU, Tokyo 1993, p. 793.
20. H. Nakahata, T. Imai and N. Fujimori, Proc. 2nd Int. Symp. on Diamond Materials, Vol. 91-8, The Chemical Society, New Jersey, 1991, p. 487.