Polycrystalline diamond pressure microsensor

Diamond and Related Materials

Volumn 5, Issue 1, 1996, Pages 86-92

  Davidson, J L ^a   Wur, D R ^a   Kang, W P ^a   Kinser, D L ^a   Kerns, D V ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

Diamond; Microelectromechanical; Microelectronic; Sensors

Indexed keywords

EID: 0003071863     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(96)80010-0     Document Type: Article

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