CVD diamond thin film technology for MEMS packaging

Diamond and Related Materials

Volumn 15, Issue 2-3, 2006, Pages 254-258

  Zhu, Xiangwei ^a   Aslam, Dean M ^a  

^a MICHIGAN STATE UNIVERSITY   (United States)

Author keywords

Diamond; Integrated; MEMS; Thin film package

Indexed keywords

DIAMONDS; MICROELECTROMECHANICAL DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS;

INTEGRATED; MEMS; THIN FILM PACKAGE;

ELECTRONICS PACKAGING;

EID: 33644883052     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.08.009     Document Type: Article

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