Nanocrystalline diamond piezoresistive sensor

Vacuum

Volumn 84, Issue 1, 2009, Pages 53-56

  Kulha, Pavel ^a   Kromka, Alexander ^b   Babchenko, Oleg ^b   Vanecek, Milan ^b   Husak, Miroslav ^a   Williams, Oliver A ^c   Haenen, Ken ^c  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c HASSELT UNIVERSITY   (Belgium)

Author keywords

Nanocrystalline diamond; Piezoresistivity; Strain sensor

Indexed keywords

3D STRUCTURES; APPLIED FORCES; BORON-DOPED; CHEMICAL VAPOUR DEPOSITION; COVENTORWARE; FEM CALCULATION; GAUGE FACTORS; GEOMETRICAL DEFORMATION; HIGH-TEMPERATURE APPLICATION; MECHANICAL STRESS; MICROWAVE PLASMA; NANOCRYSTALLINE DIAMOND; NANOCRYSTALLINE DIAMOND FILMS; NANOCRYSTALLINE DIAMONDS; NCD FILMS; PATTERNED GROWTH; PIEZORESISTIVE SENSING; PIEZORESISTIVE SENSORS; PIEZORESISTIVITY; PIEZORESISTOR; ROOM TEMPERATURE; SILICON-ON-INSULATORS; STRAIN SENSOR;

BORON; DIAMONDS; FILM GROWTH; MICROWAVES; NANOCRYSTALLINE MATERIALS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SENSORS; SILICON COMPOUNDS; SILICON OXIDES; STRESSES;

DIAMOND FILMS;

EID: 69249208536     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.04.023     Document Type: Article

References (20)

1. Werner M., Gluche P., Adamschik M., Kohn E., and Fecht H.J. Industrial Electronics 1 (1998) 147
2. Tang L., Tsai C., Gerberich W., Kruckeberg L., and Kania D. Biomaterials 16 6 (1995) 483
3. Boiko Y., Gonon P., Prawer S., and Jamieson D.N. Material Science and Engineering B46 (1997) 112
4. Dorsch O., Holzner K., Werner M., Obermeier E., Harper R.E., Johnston C., et al. Diamond Relatated Materials 2 (1993) 1096
5. Deguchi M., Hase N., Kitabatake M., Kotera H., Shima S., and Kitagawa M. Diamond Relatated Materials 6 (1997) 367
6. Yamamoto A., Norio N., and Takahiro T. Diamond Relatated Materials 16 (2007) 1670
7. Kromka A., Potocky S., Čermák J., Rezek B., Zemek J., and Vaněček M. Diamond Related Materials 17 (2008) 1252
8. Kromka A, Babchenko O, Rezek B, Ledinsky M, Hruska K, Potmesil J, et al. Abstract Book of the Conference "New Diamond and Nano Carbons". 2008, p. 185.
9. Gajewski W., Achatz P., Williams O.A., Haenen K., Bustarret E., Stutzmann M., et al. Phys Rev B 79 (2009) 045206
10. Elwenspoek M., and Wiegerink. Mechanical microsensors (2001), Springer p. 90
11. CoventorWare user manual, R4-1.
12. Bühlmann S., Blank E., Haubner R., and Lux B. Diamond Related Materials 8 (1999) 194
13. Heidger S.L. Materials Research Society Symposium Proceedings 383 (1995) 319
14. Kuzmany H., Pfeiffer R., Salk N., and Günther B. Carbon 42 (2004) 911
15. Ruan J., Choyke W.J., and Parlow W.D. Applied Physics Letters 58 (1991) 295
16. Clark C.D., Kanda H., Kiflawi I., and Sittas G. Physical Review B 51 (1995) 16681
17. Kulha P, Vyborny Z, Husak M. Proceedings of MIPRO'06; 2006. p. 57.
18. Kulha P, Boura A, Husak M, Mikulik P, Kucera M, Valedna S. Proceedings of EDS'08; 2008. p. 164.
19. Tang Y, Aslam D, Wang J, Wise K. Transducers; 2005. p. 543.
20. Auberton-Herve A.J. Microelectronic Engineering 2 (1993) 339