Diamond microelectronic gas sensors

Sensors and Actuators, B: Chemical

Volumn 33, Issue 1-3, 1996, Pages 100-104

  Gurbuz, Yasar ^a   Kang, Weng Poo ^a   Davidson, Jimmy L ^a,b   Kinser, Donald L ^a   Kerns, David V ^a  

^a VANDERBILT UNIVERSITY   (United States)

^b VANDERBILT UNIVERSITY   (United States)

Author keywords

Diamond; Microelectronic gas sensor; Plasma enhanced chemical vapor deposition

Indexed keywords

EID: 0042138204     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-4005(96)01839-4     Document Type: Article

References (5)

1. I. Lunström, M. Armgarth, A. Spetz and F. Windquist, Gas sensors based on catalytic metal-gate field-effect devices, Sensors and Actuators, 10 (1986) 399-421.
2. I. Lundström, S. Shivaraman and C. Svensson, A hydrogen-sensitive Pd-gate MOS transistor, J. Appl. Phys., 46 (1975) 3876-3881.
3. W.P. Kang and Y. Gurbuz, Comparison and analysis of Pd- and Pt-GaAs Schottky diodes for hydrogen detection, J. Appl. Phys., 75 (1994) 8175-8181.
4. xor ZnO)-insulator-semiconductor gas sensors, Sensors and Actuators, 22 (1994) 47-55.
5. J.L. Davidson, Diamond properties and electronic devices, invited paper, Int. Symp. Diamond Sci. Technol. (Electrochem. Soc. Meeting), Hawaii, 1993.