Unusual morphology of CVD diamond surfaces after RIE

Diamond and Related Materials

Volumn 17, Issue 7-10, 2008, Pages 1164-1168

  Stoikou, Maria D ^a   John, Phillip ^a   Wilson, John I B ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

Chemical vapor deposition; Diamond film; Microstructure; Plasma CVD; Reactive ion etching (RIE)

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; REACTIVE ION ETCHING;

CVD DIAMOND FILMS; CVD DIAMONDS; DIAMOND FILM; MICROSTRUCTURE; PLASMA CVD; REACTIVE ION ETCHING (RIE);

DIAMOND FILMS;

EID: 48849108539     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.03.018     Document Type: Article

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