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Volumn 46, Issue 1-3, 1997, Pages 112-114
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Piezoresistivity of boron doped CVD diamond films
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Author keywords
Chemical vapor deposition; Diamond thin film; Piezoresistivity
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Indexed keywords
PIEZORESISTIVITY;
BAND STRUCTURE;
BORON;
CHEMICAL VAPOR DEPOSITION;
ELECTRIC CONDUCTIVITY MEASUREMENT;
GRAIN BOUNDARIES;
POLYCRYSTALLINE MATERIALS;
SEMICONDUCTOR DOPING;
THIN FILMS;
DIAMOND FILMS;
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EID: 0031123749
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(96)01944-7 Document Type: Article |
Times cited : (11)
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References (11)
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