Fabrication of diamond nano-whiskers

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 295-298

  Baik, E S ^a   Baik, Y J ^a   Lee, S W ^b   Jeon, D ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Myong Ji University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL WHISKERS; DRY ETCHING; MASKS; PLASMA ETCHING; POLYCRYSTALLINE MATERIALS; SUBSTRATES;

DIAMOND NANO-WHISKERS; ETCH-RESISTANT MASKS;

DIAMOND FILMS;

EID: 18844465851     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01431-0     Document Type: Article

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