Single-structure heater and temperature sensor using a p-type polycrystalline diamond resistor

IEEE Electron Device Letters

Volumn 17, Issue 5, 1996, Pages 250-252

  Yang, G S ^b   Aslam, D M ^a,b  

^a IEEE

^b Michigan State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; HEATING; INTEGRATED CIRCUIT MANUFACTURE; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING DIAMONDS; SEMICONDUCTING SILICON; SENSORS; TEMPERATURE MEASUREMENT;

DIAMOND HEATER; HEAT GENERATION; POLYCRYSTALLINE DIAMOND RESISTOR; POWER DENSITY; SINGLE STRUCTURE HEATER; TEMPERATURE RESPONSE; TEMPERATURE SENSOR;

RESISTORS;

EID: 0030150771     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.491845     Document Type: Article

References (11)

1. Herbert B. Sachse, Semiconducting Temperature Sensors and Their Applications. New York: Wiley, 1975.
2. M. Aslam, G. S. Yang, and A. Masood, "Boron-doped vapor-deposited diamond temperature microsensors," Sensors and Actuators: A, vol. 45, no. 2, pp. 131-137, 1994.
3. M. Aslam and O. Schulz. "Technology of Diamond Microelectromechanical Systems." in 8th Int. Conf. Solid-State Sensors and Actuators Tech. Dig., Stockholm, Sweden, 1995, vol. 2, pp. 222-224.
4. A. Masood, M. Aslam, M. A. Tamor, and T. J. Poner, "Techniques for patterning of CVD diamond films on nondiamond substrates." J. Electrochem. Soc., vol. 138, no. 11, pp. L67-L68, 1991.
5. J. D. Hunn, and P. C. Christensen, "Ion beam and laser-assisted micromachining of single-crystal diamond," Solid State Tech., vol. 37, no. 12, pp. 57-60, 1994.
6. I. Taher, M. Aslam, M. A. Tamor, T. J. Potter, and R. C. Elder, "Piezoresistive microsensors using p-type CVD diamond films," Sensors and Actuators: A, vol. 45, no. 1, pp. 35-43, 1994.
7. A Masood, "Technology and Electronic Properties of Diamond Film Microsensors for Thermal Signals," Ph.D. dissertation, Michigan State Univ., pp. 67-71, 1991.
8. R. B. Tait, R. Humphries, and J. Lorenz, Thick film heater elements and temperature sesors in modern domestic appliances," IEEE Trans, Indust. Applicat., vol. 30, no. 3, pp. 573-577, 1994.
9. A Sale, R Tait, J. Whitmarsh, and M. A. Stein, "Truck film heater elements and heat sensor," Hybrid Circuit Tech., pp.37-43, 1991.
10. R. Pallas-Areny and J. G. Wesbster, Sensors and Signal Conditioning. New York: Wiley, 1991, pp. 55-61.
11. J. P. Bade, S. R. Sahaida, B. R. Stoner, J. A. von Windhim, J. T. Glass, K. Miyata, K. Nishimura, and K. Kobashi, "Fabrication of diamond thin-film thermistors for high-tenoerature application, "Diamond and Realated Materials, vol. 2, pp. 816-819, 1993.