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Materials Science and Engineering: R: Reports

Volumn 36, Issue 4, 2002, Pages 105-142

The metal-organic chemical vapor deposition and properties of III-V antimony-based semiconductor materials

(1) Biefeld, Robert M a

a SANDIA NATIONAL LABORATORIES (United States)

Author keywords

Antimonides; III V semiconductors; Metal organic chemical vapor deposition; MOCVD

Indexed keywords

METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANOMETALLICS; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; SEMICONDUCTOR SUPERLATTICES;

ORGANOMETALLIC SOURCES;

SEMICONDUCTING ANTIMONY COMPOUNDS;

EID: 0037087312 PISSN: 0927796X EISSN: None Source Type: Journal
DOI: 10.1016/S0927-796X(02)00002-5 Document Type: Review

Times cited : (121)

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