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Volumn 97, Issue 11, 1996, Pages 975-977
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Study of GaInAsSb epilayer by scanning electron acoustic microscopy
a a a a a a a |
Author keywords
A. semiconductors; B. surface and interface; C. grain boundaries
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Indexed keywords
ACOUSTIC MICROSCOPES;
GRAIN BOUNDARIES;
HYDROGEN;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR GROWTH;
SUBSTRATES;
SURFACES;
GROWTH TEMPERATURE;
SCANNING ELECTRON ACOUSTIC MICROSCOPY;
TRIMETHYLANTIMONY;
TRIMETHYLGALLIUM;
TRIMETHYLINDIUM;
SEMICONDUCTING GALLIUM COMPOUNDS;
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EID: 0030109322
PISSN: 00381098
EISSN: None
Source Type: Journal
DOI: 10.1016/0038-1098(95)00709-1 Document Type: Article |
Times cited : (9)
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References (8)
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