Infrared single wavelength gas composition monitoring for metalorganic vapour-phase epitaxy

Journal of Crystal Growth

Volumn 221, Issue 1-4, 2000, Pages 166-171

  Watkins, S P ^a   Pinnington, T ^a   Hu, J ^a   Yeo, P ^a   Kluth, M ^a   Mason, N J ^b   Nicholas, R J ^b   Walker, P J ^b  

^a SIMON FRASER UNIVERSITY   (Canada)

^b UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; COMPOSITION EFFECTS; INFRARED RADIATION; LIGHT ABSORPTION; PHOTOLYSIS;

INFRARED SINGLE WAVELENGTH GAS COMPOSITION;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0034512368     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00680-1     Document Type: Article

References (11)

1. Sillmon R.S., Bottka N., Butler J.E., Gaskill D.K. J. Crystal Growth. 77:1986;73.
2. Butler J.E., Bottka N., Sillmon R.S., Gaskill D.K. J. Crystal Growth. 77:1986;163.
3. Hebner G.A., Killeen K.P., Biefeld R.M. J. Crystal Growth. 98:1989;293.
4. Booker G.R., Daly M., Klipstein P.C., Lakrimi M., Kuech T.F., Li J., Lyapin S.G., Mason N.J., Murgatroyd I.J., Portal J.C., Nicholas R.J., Symons D.M., Vicente P., Walker P.J. J. Crystal Growth. 170:1997;777.
5. Gaffney M.S., Reaves C.M., Smith R.S., Holmes A.L., DenBaars S.P. J. Crystal Growth. 167:1996;8.
6. Stagg J.P., Christer J., Thrush E.J., Crawley J. J. Crystal Growth. 120:1992;98.
7. Wajid A., Gogol C., Hurd C., Hetzel M., Spina A., Lum R., McDonald M., Capik R.J. J. Crystal Growth. 170:1997;237.
8. Salim S., Jensen K.F., Driver R.D. J. Crystal Growth. 145:1994;28-35.
9. Agahi F., Lutz C.R., Lau K.M. J. Crystal Growth. 139:1994;344.
10. Roberts J.S., Mason N.J., Robinson M. J. Crystal Growth. 68:1984;422.
11. Mason N.J., Walker P.J. J. Crystal Growth. 107:1991;181.