A review of feedforward control approaches in nanopositioning for high-speed spm

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 131, Issue 6, 2009, Pages 1-19

  Clayton, Garrett M ^a   Tien, Szuchi ^b   Leang, Kam K ^c   Zou, Qingze ^d   Devasia, Santosh ^a,e  

^a Villanova University   (United States)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c University of Nevada   (United States)

^d Iowa State University of Science and Technology   (United States)

^e University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIO-SAMPLES; EMERGING APPLICATIONS; EXISTING METHOD; FEED-FORWARD; FEEDFORWARD INPUT; HIGH BANDWIDTH; HIGH-SPEED; IMAGE-BASED CONTROL; ITERATIVE CONTROL; MODEL UNCERTAINTIES; NANO SCALE; NANO-POSITIONING; OPERATING SPEED; REQUIRED PRECISION; SCANNING PROBE MICROSCOPE; SUBNANOMETERS; ZERO-PHASE;

NANOTECHNOLOGY; SPEED; UNCERTAINTY ANALYSIS;

FEEDFORWARD CONTROL;

EID: 77955509062     PISSN: 00220434     EISSN: 15289028     Source Type: Journal    
DOI: 10.1115/1.4000158     Document Type: Review

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