Design and modeling of a high-speed AFM-scanner

IEEE Transactions on Control Systems Technology

Volumn 15, Issue 5 SPEC. ISS., 2007, Pages 906-915

  Schitter, Georg ^a   Åström, Karl J ^b   DeMartini, Barry E ^b   Thurner, Philipp J ^b   Turner, Kimberly L ^c   Hansma, Paul K ^c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b University of California   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Atomic force microscopy; Fast scanning; Mechatronics; Nanotechnology; Precision positioning; Real time imaging

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; BANDWIDTH REQUIREMENTS; BIOLOGICAL SAMPLES; DESIGN AND MODELING; DESIGN PARAMETERS; FAST SCANNING; FOURTH ORDERS; HIGH-SPEED; HIGH-SPEED AFM; MECHANICAL SCANNERS; MODELING AND CONTROLS; PRECISION POSITIONING; PROPORTIONAL INTEGRALS; REAL TIME IMAGING; RESONANCE FREQUENCIES; VERTICAL DIRECTIONS;

ATOMIC FORCE MICROSCOPY; ATOMS; MECHATRONICS; NANOTECHNOLOGY; RESONANCE;

SCANNING;

EID: 38849136027     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2007.902953     Document Type: Article

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