Design and analysis of discrete-time repetitive control for scanning probe microscopes

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 131, Issue 6, 2009, Pages 1-12

  Aridogan, Ugur ^a   Shan, Yingfeng ^a   Leang, Kam K ^a  

^a Department of Computer Science and Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; DESIGN AND ANALYSIS; DIGITAL IMPLEMENTATION; DISCRETE-TIME; FEEDBACK CONTROL LOOPS; FEEDBACK CONTROLLER; HYSTERESIS EFFECT; LATERAL SCANNING; LINEAR PHASE; NANOFABRICATION; OPERATING CYCLE; PERIODIC TRAJECTORIES; PHASE-LEAD COMPENSATION; PID CONTROL; PIEZO ACTUATOR; PROPORTIONAL INTEGRAL DERIVATIVES; REPETITIVE CONTROL; RESIDUAL ERROR; SCAN RATES; SCANNING PROBE MICROSCOPE; STEADY STATE TRACKING; TRACKING ERRORS; TWO PHASE;

ATOMIC FORCE MICROSCOPY; FEEDBACK CONTROL; MICROSCOPES; PROBES; SCANNING; THREE TERM CONTROL SYSTEMS; TWO TERM CONTROL SYSTEMS;

PROPORTIONAL CONTROL SYSTEMS;

EID: 77955855045     PISSN: 00220434     EISSN: 15289028     Source Type: Journal    
DOI: 10.1115/1.4000068     Document Type: Article

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