High-speed serial-kinematic AFM scanner: Design and drive considerations

Proceedings of the American Control Conference

Volumn , Issue , 2008, Pages 3188-3193

  Leang, Kam K ^a   Fleming, Andrew J ^b  

^a Virginia Commonwealth University   (United States)

^b UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; EXTREME ULTRAVIOLET LITHOGRAPHY; FINITE ELEMENT METHOD; IMAGING TECHNIQUES; NUCLEIC ACIDS; ORGANIC ACIDS; PIEZOELECTRIC ACTUATORS; RESONANCE; SPEED; THREE DIMENSIONAL; TOOLS;

AFM IMAGING; APPLICATIONS.; ATOMIC FORCE MICROSCOPE; CONTROL HARDWARES; DNA MOLECULES; FAST SCANNING; FAST-AXIS; FINITE ELEMENT ANALYSIS; HIGH RESOLUTIONS; HIGH SPEEDS; HIGH-SPEED SCANNING; HIGH-SPEED SERIAL; MECHANICAL RESONANCES; PIEZOELECTRIC STACK ACTUATORS; SCAN RANGE; SCANNER DESIGNS; TRAJECTORY DESIGNS; TWO-AXIS;

SCANNING;

EID: 52449097511     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2008.4586983     Document Type: Conference Paper

References (16)

1. M. Guthold, X. Zhu, C. Rivetti, G. Yang, N. H. Thomson, S. Kasas, H. G. Hansma, B. Smith, P. K. Hansma, and C. Bustamante. Real-time imaging of one-dimensional diffusion and transcription by Escherichia coli RNA polymerase. Biophys. J., 77(4):2284 - 2294, 1999.
2. E. S. Snow, P. M. Campbell, and F. K. Perkins. Nanofabrication with proximal probes. Proc. of the IEEE, 85(4):601-611, 1997.
3. T. Ando, N. Kodera, D. Maruyama, E. Takai, K. Saito, and A. Toda. A high-speed atomic force microscope for studying biological macromolecules in action. Jpn. J. Appl. Phys. Part 1, 41(7B):4851 - 4856, 2002.
4. T. Ando, N. Kodera, T. Uchihashi, A. Miyagi, R. Nakakita H. Yamashita, and K. Matada. High-speed atomic force microscopy for capturing dynamic behavior of protein molecules at work. e-J. Surf. Sci. Nanotech., 3:384 - 392, 2005.
5. G. Schitter, K. J. Astrom, B. E. DeMartini, P. J. Thurner, K. L. Turner, and P. K. Hansma. Design and modeling of a high-speed AFM-scanner. IEEE Control Systems Technology, 15(5):906 - 915, 2007.
6. J. H. Kindt, G. E. Fantner, and J. A. Cutroni P. K. Hansma. Rigid design of fast scanning probe microscopes using finite element analysis. Ultramicroscopy, 100(3-4):259 - 265, 2004.
7. M. J. Rost, L. Crama, P. Schakel, E. van Tol, G. B. E. M. van Velzen-Williams, C. F. Overgauw, H. ter Horst, H. Dekker, B. Okhuijsen, M. Seynen, A. Vijftigschild, P. Han, A. J. Katan, K. Schoots, R. Schumm, W. van Loo, T. H. Oosterkamp, and J. W. M. Frenken. Scanning probe microscopes go video rate and beyond. Rev. Sci. Instr., 76:053710-1 - 053710-9, 2005.
8. A. D. L. Humphris, J. K. Hobbs, and M. J. Miles. Ultrahigh-speed scanning near-field optical microscopy capable of over 100 frames per second. Applied Physics Letters, 83(1):6 - 8, 2003.
9. G. Schitter. Advanced mechanical design and control methods for atomic force microscopy in real-time. In American Control Conference, pages 3503 - 3508, New York City, USA, 2007.
10. S.O. R. Moheimani and A. J. Fleming. Piezoelectric transducers for vibration control and damping (advances in industrial control). Springer, 2006.
11. G. Binnig and C. F. Quate. Atomic force microscope. Phys. Rev. Lett., 56(9):930-933, 1986.
12. W. D. Callister. Materials science and engineering: an introduction. John Wiley and Sons, Inc., New York, 1994.
13. J. Case, L. Chilver, and C. T. F. Ross. Strength of materials and structures. John Wiley and Sons, New York, USA, 4th edition, 1999.
14. D. Croft, G. Shed, and S. Devasia. Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application. ASME J. Dyn. Syst., Meas., and Control, 123:35-43, 2001.
15. William E. Singhose, Arun K. Banergee, and Warren P. Seering. Slewing flexible spacecraft with deflection-limiting input shaping. AIAA J. Guidance, Control, and Dynamics, 20(2):291-298, 1997.
16. A. J. Fleming and A. Wills. Optimal input signals for bandlimited scanning systems. In 17th IFAC World Congress, Seoul, Korea, 2008.